, Volume 34, Issue 3, pp 232-239

Reprocessing of thermally oxidized aluminum arsenide (AlAs) in epitaxial multilayers without delamination

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Abstract

Annealing or processing of AlAs that has been subjected to a wet thermal oxidation process can result in severe delamination of material at the oxidation front. This paper reports a procedure for preventing this delamination and presents a possible cause for the delamination.