Silicon-integrated uncooled infrared detectors: Perspectives on thin films and microstructures
- Cite this article as:
- Mehta, V.R., Shet, S., Ravindra, N.M. et al. Journal of Elec Materi (2005) 34: 484. doi:10.1007/s11664-005-0055-z
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Uncooled infrared (IR) photodetectors for telecommunications, optical processor interconnects, and focal plane arrays are advantageously integrated into systems that are silicon based through advanced thin-film technologies. This paper reviews challenges of materials, microstructures, interfaces, and reactions of thin-film materials and technologies posed by such applications.