Journal of Electronic Materials

, Volume 34, Issue 5, pp 484–490

Silicon-integrated uncooled infrared detectors: Perspectives on thin films and microstructures

  • V. R. Mehta
  • S. Shet
  • N. M. Ravindra
  • A. T. Fiory
  • M. P. Lepselter
Special Issue Paper

DOI: 10.1007/s11664-005-0055-z

Cite this article as:
Mehta, V.R., Shet, S., Ravindra, N.M. et al. Journal of Elec Materi (2005) 34: 484. doi:10.1007/s11664-005-0055-z

Abstract

Uncooled infrared (IR) photodetectors for telecommunications, optical processor interconnects, and focal plane arrays are advantageously integrated into systems that are silicon based through advanced thin-film technologies. This paper reviews challenges of materials, microstructures, interfaces, and reactions of thin-film materials and technologies posed by such applications.

Key words

Photoreceivers microbolometers micro-electro-mechanical systems (MEMS) photovoltaics photoconductors 

Copyright information

© TMS-The Minerals, Metals and Materials Society 2005

Authors and Affiliations

  • V. R. Mehta
    • 1
  • S. Shet
    • 1
  • N. M. Ravindra
    • 1
  • A. T. Fiory
    • 1
  • M. P. Lepselter
    • 2
  1. 1.Department of PhysicsNew Jersey Institute of TechnologyNewark
  2. 2.BTL Fellows, Inc.Summit

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