Journal of Electronic Materials

, Volume 30, Issue 11, pp 1433–1437

Purification of dialkylzinc precursors using tertiary amine ligands

  • L. M. Smith
  • K. M. Coward
  • A. C. Jones
  • J. F. Bickley
  • A. Steiner
  • S. Petroni
  • J. S. Roberts
Special Issue Paper

DOI: 10.1007/s11664-001-0198-5

Cite this article as:
Smith, L.M., Coward, K.M., Jones, A.C. et al. Journal of Elec Materi (2001) 30: 1433. doi:10.1007/s11664-001-0198-5
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Abstract

Tertiary amines are useful for the production of high purity low-oxygen content R2Zn dopant sources. Trace oxygen levels in Me2Zn are significantly reduced by formation of the Me2Zn.NEt3 adduct, which is a more controllable and reproducible source than Me2Zn/H2 gas mixtures. Me2Zn and Et2Zn form 2∶1 adducts with the macrocyclic tertiary amines 1,4,8,11-tetramethyl-1,4,8,11-tetraazacyclotetradecane (N4-aza crown) and 1,4,7,10,13,16-hexamethyl-1,4,7,10,13,16-hexaazacyclooctadecane (N6-aza crown), and the structure of these compounds has been determined by single crystal x-ray crystallography. Mild thermal dissociation of R2Zn-aza crown adducts yields base-free R2Zn, giving them potential applications in the purification of Me2Zn and Et2Zn dopant sources for the MOVPE of III–V materials.

Key words

Dimethylzinc diethylzinc tertiary amines adducts 

Copyright information

© TMS-The Minerals, Metals and Materials Society 2001

Authors and Affiliations

  • L. M. Smith
    • 1
  • K. M. Coward
    • 1
  • A. C. Jones
    • 2
  • J. F. Bickley
    • 2
  • A. Steiner
    • 2
  • S. Petroni
    • 3
  • J. S. Roberts
    • 4
  1. 1.Epichem LimitedWirralUK
  2. 2.Department of ChemistryUniversity of LiverpoolLiverpoolUK
  3. 3.Instituto Nazionale per la Fisca della Materia (INFM) UdR LecceLecceItaly
  4. 4.Department of Electronic and Electrical EngineeringUniversity of SheffieldSheffieldUK

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