Journal of Electronic Materials

, 29:565

Self-assembled metal/molecule/semiconductor nanostructures for electronic device and contact applications

  • D. B. Janes
  • Takhee Lee
  • Jia Liu
  • M. Batistuta
  • Nien-Po Chen
  • B. L. Walsh
  • R. P. Andres
  • E. -H. Chen
  • M. R. Melloch
  • J. M. Woodall
  • R. Reifenberger
Special Issue Paper

DOI: 10.1007/s11664-000-0046-z

Cite this article as:
Janes, D.B., Lee, T., Liu, J. et al. Journal of Elec Materi (2000) 29: 565. doi:10.1007/s11664-000-0046-z

Abstract

We report a fabrication approach in which we combine self-assembled metal/molecule nanostructures with chemically stable semiconductor surface layers. The resulting structures have well controlled dimensions and geometries (∼4 nm Au nanoclusters) provided by the chemical self-assembly and have stable, low-resistance interfaces realized by the chemically stable semiconductor cap layer (low-temperature grown GaAs passivated by the organic tether molecules). Scanning tunneling microscope imaging and current-voltage spectroscopy of nanocontacts ton-GaAs fabricated using this approach indicate high quality, ohmic nanocontacts having a specific contact resistance of ∼1 × 10−7Ω·cm2 and a maximum current density of ∼1×107 A/cm2, both comparable to those observed in large area contacts. Uniform 2-D arrays of these nanocontact structures have been fabricated and characterized as potential cells for nanoelectronic device applications.

Key words

Self-assemblynanoclusterohmic contactGaAsSTM

Copyright information

© TMS-The Minerals, Metals and Materials Society 2000

Authors and Affiliations

  • D. B. Janes
    • 1
  • Takhee Lee
    • 2
  • Jia Liu
    • 3
  • M. Batistuta
    • 1
  • Nien-Po Chen
    • 2
  • B. L. Walsh
    • 1
  • R. P. Andres
    • 3
  • E. -H. Chen
    • 1
    • 4
  • M. R. Melloch
    • 1
    • 4
  • J. M. Woodall
    • 1
    • 4
  • R. Reifenberger
    • 2
  1. 1.School of Electrical and Computer EngineeringPurdue UniversityW. Lafayette
  2. 2.Department of PhysicsPurdue UniversityW. Lafayette
  3. 3.School of Chemical EngineeringPurdue UniversityW. Lafayette
  4. 4.NSF MRSEC for Technology Enabling Heterostructure MaterialsPurdue UniversityW. Lafayette
  5. 5.Department of Electrical EngineeringYale UniversityNew Haven