, Volume 22, Issue 8, pp 797-804

Statistical Characterization and Process Control for Improved Growth of La2−x Sr x CuO4 Films

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We have used combinatorial molecular beam epitaxy (COMBE) technique to deposit thin cuprate films with continuous spread in chemical composition, as well as nominally uniform films. We have patterned them into linear pixel arrays and measured the transport properties of each pixel. We applied detailed statistical analysis to differentiate between various possible sources of random pixel-to-pixel variations, and utilized this knowledge to considerably tighten the process parameters and significantly reduce such variations. The density and quality of data points is high enough to allow detection of quantum phase transitions induced by tuning the chemical composition.