Journal of Superconductivity

, Volume 18, Issue 1, pp 109–113

Fabrication of Ternary Phase Composition-Spread Thin Film Libraries and Their High-Throughput Characterization: Ti1−xyZrxHfyO2 for Bandgap Engineering

  • Y. Yamada
  • T. Fukumura
  • M. Ikeda
  • M. Ohtani
  • H. Toyosaki
  • A. Ohtomo
  • F. Matsukura
  • H. Ohno
  • M. Kawasaki
Article

DOI: 10.1007/s10948-005-2160-x

Cite this article as:
Yamada, Y., Fukumura, T., Ikeda, M. et al. J Supercond (2005) 18: 109. doi:10.1007/s10948-005-2160-x

Abstract

Ternary phase composition-spread thin film libraries, TiO2-ZrO2-HfO2, were synthesized by using a combinatorial pulsed laser deposition system. The composition, crystalline structure, and optical transmission properties were characterized in a high-throughput way. TiO2 doped with Zr and Hf was found to exhibit a wider bandgap than pure TiO2; hence, these compounds can be used as wide gap semiconductors for heteroepitaxial spintronics devices, based on a ferromagnetic semiconductor, Co-doped TiO2.

Keywords

combinatorial libraryoxide semiconductorTiO2ferromagnetic semiconductorwide gap

Copyright information

© Springer Science + Business Media, Inc. 2005

Authors and Affiliations

  • Y. Yamada
    • 1
  • T. Fukumura
    • 1
  • M. Ikeda
    • 1
  • M. Ohtani
    • 1
  • H. Toyosaki
    • 1
  • A. Ohtomo
    • 1
    • 2
  • F. Matsukura
    • 3
  • H. Ohno
    • 3
  • M. Kawasaki
    • 1
    • 4
  1. 1.Institute for Materials ResearchTohoku UniversitySendaiJapan
  2. 2.Japan Science and Technology AgencyKawaguchiJapan
  3. 3.Research Institute of Electrical CommunicationTohoku UniversitySendaiJapan
  4. 4.Combinatorial Materials Exploration and TechnologyNational Institute for Materials ScienceTsukubaJapan