Fabrication of Ternary Phase Composition-Spread Thin Film Libraries and Their High-Throughput Characterization: Ti1−x−yZrxHfyO2 for Bandgap Engineering
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- Yamada, Y., Fukumura, T., Ikeda, M. et al. J Supercond (2005) 18: 109. doi:10.1007/s10948-005-2160-x
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Ternary phase composition-spread thin film libraries, TiO2-ZrO2-HfO2, were synthesized by using a combinatorial pulsed laser deposition system. The composition, crystalline structure, and optical transmission properties were characterized in a high-throughput way. TiO2 doped with Zr and Hf was found to exhibit a wider bandgap than pure TiO2; hence, these compounds can be used as wide gap semiconductors for heteroepitaxial spintronics devices, based on a ferromagnetic semiconductor, Co-doped TiO2.