Catalyst-free MOCVD growth of ZnO nanorods and their structural characterization

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Abstract

We have synthesized ZnO nanorods on ZnO-coated Si(100) substrates without a metal catalyst by a reaction of a diethylzinc (DEZn) and oxygen (O2) mixture. By adjusting the argon (Ar)/O2 gas flow ratio, we have obtained ZnO nanorods of various densities at a temperature of 450°C. The ZnO nanorods had an average diameter of 30–70 nm, and transmission electron microscopy (TEM) showed a single crystalline structure.