Journal of Materials Science

, Volume 48, Issue 2, pp 920–928

Microstructure analysis of ion beam-induced surface nanostructuring of thin Au film deposited on SiO2 glass

  • Xuan Meng
  • Tamaki Shibayama
  • Ruixuan Yu
  • Shinya Takayanagi
  • Seiichi Watanabe
Article

DOI: 10.1007/s10853-012-6816-1

Cite this article as:
Meng, X., Shibayama, T., Yu, R. et al. J Mater Sci (2013) 48: 920. doi:10.1007/s10853-012-6816-1

Abstract

Effects of the irradiation dose on surface nanostructuring accompanied with the dewetting process of Au films deposited on SiO2 glass were examined using an atomic force microscope and a scanning electron microscope. In addition, the microstructural evolution and the chemical concentration of Au films were investigated using a transmission electron microscope equipped with an energy-dispersive spectrometer. As increasing the Ar ion irradiation dose, the lattice expansion of Au nanoscale islands sustained on the SiO2 glass was observed and irradiation-induced lattice defects together with irradiation-induced interface ion mixing were accounted for this lattice expansion. Finally a layer of photosensitive Au nanoballs with highly spherical shape embedded in a SiO2 substrate was obtained after Ar ion irradiation to 10.0 × 1016/cm2 and some of Au nanoballs were found to be single crystals. As the irradiation energy of the Ar ions increased from 100 to 150 keV, the average diameter of the Au nanoballs in the substrate increased and the red shift of the SPR peak was observed. This tendency of the experimental SPR peaks corresponded with that of the theoretically calculated SPR peaks using Mie solution.

Abbreviations

UV

Ultraviolet

AFM

Atomic force microscope

TEM

Transmission electron microscope

SEM

Scanning electron microscope

EDS

Energy-dispersive spectrometry

SPR

Surface plasmon resonance

FCC

Face-centered cubic

Copyright information

© Springer Science+Business Media, LLC 2012

Authors and Affiliations

  • Xuan Meng
    • 1
    • 3
  • Tamaki Shibayama
    • 2
  • Ruixuan Yu
    • 1
  • Shinya Takayanagi
    • 1
  • Seiichi Watanabe
    • 2
  1. 1.Graduate School of EngineeringHokkaido UniversitySapporoJapan
  2. 2.Center for Advanced Research of Energy Conversion Materials, Faculty of EngineeringHokkaido UniversitySapporoJapan
  3. 3.School of Nuclear Science and TechnologyLanzhou UniversityLanzhouChina