Abstract
Initial crystallization of Pb-deficient, lanthanum modified lead zirconate titanate (PLZT) layers followed by post-crystallization phase conversion can be used to obtain high quality PLZT thin films. However, phase evolution in Pb-deficient PLZT thin films is not well understood. To characterize phase evolution in these films, we developed a new in situ, high-temperature X-ray diffraction (XRD) measurement approach for slow heating rates. The well-characterized Pb-excess PLZT composition was used for comparison and to validate the new XRD setup described herein. During crystallization of Pb-deficient thin films, a Pb-rich/La-poor perovskite phase and Pb-poor/La-rich fluorite phase were observed to form simultaneously. The fluorite phase was observed to partially transform into a secondary perovskite phase at higher temperatures. The results obtained are discussed in view of the current understanding of phase evolution in these materials. The details of the new in situ XRD technique are also presented.
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Dimos D, Mueller CH (1998) Annu Rev Mater Sci 28:397
Scott JF (2007) Science 315:954
Muralt P (2000) J Micromech Mircoeng 10:136
Auciello O, Scott JF, Ramesh R (1998) Phys Today 51:22
Reaney IM, Brooks K, Klissurska R, Pawlaczyk C, Setter N (1994) J Am Ceram Soc 77:1209
Brennecka GL, Tuttle BA (2007) J Mater Res 22:2868
Brennecka GL, Parish CM, Tuttle BA, Brewer LN, Rodriguez MA (2008) Adv Mater 20:1407
Polli AD, Lange FF, Levi CG (2000) J Am Ceram Soc 83:873
Huang Z, Zhang Q, Whatmore RW (1998) J Mater Sci Lett 17:1157
Chen SY, Chen IW (1998) J Am Ceram Soc 81:97
Chen SY, Chen IW (1994) J Am Ceram Soc 77:2332
Griswold EM, Weaver L, Sayer M, Calder ID (1995) J Mater Res 10:3149
Huang Z, Zhang Q, Whatmore RW (1999) J Appl Phys 85:7355
Wilkinson AP, Speck JS, Cheetham AK, Natarajan S, Thomas JM (1994) Chem Mater 6:750
Chen J, Udayakumar KR, Brooks KG, Cross LE (1992) J Appl Phys 71:4465
Assink RA, Schwartz RW (1993) Chem Mater 5:511
Brennecka GL, Parish CM, Tuttle BA, Brewer LN (2008) J Mater Res 23:176
Pramanick A, Omar S, Nino JC, Jones JL (2009) J Appl Cryst 42:490
Kwok CK, Desu SB (1993) J Mater Res 8:339
Chen SY, Chen IW (1994) J Am Ceram Soc 77:2337
Lakeman CDE, Xu ZK, Payne DA (1995) J Mater Res 10:2042
Norga GJ, Vasiliu F, Fe L, Wouters DJ, Van der Biest O (2003) J Mater Res 18:1232
Kwok CK, Desu SB (1994) J Mater Res 9:1728
Jacobs RN, Salamanca-Riba L (2003) J Mater Res 18:1405
Sengupta SS, Ma L, Adler DL, Payne DA (1995) J Mater Res 10:1345
Parish CM, Brennecka GL, Tuttle BA, Brewer LN (2008) J Mater Res 23:2944
Breval E, Wang C, Dougherty JP, Gachigi KW (2005) J Am Ceram Soc 88:437
Calame F, Muralt P (2007) Appl Phys Lett 90:162901
Jaffe B, Cook WR, Jaffe H (1971) Piezoelectric ceramics. Academic Press, New York
Parish CM, Brennecka GL, Tuttle BA, Brewer LN (2008) J Am Ceram Soc 91:3690
Acknowledgements
This work was supported by the National Institute for NanoEngineering (NINE) and the Laboratory Directed Research and Development program at Sandia National Laboratories. Sandia National Laboratories is a multi-program laboratory operated by Sandia Corporation, a wholly owned subsidiary of Lockheed Martin Company, for the U.S. Department of Energy’s National Nuclear Security Administration under contract DE-AC04-94AL85000. JLJ acknowledges NSF for funding through award number DMR-0746902. The authors would also like to thank Dr. Valentin Craciun and MAIC at University of Florida for access to the Philips X’Pert XRD and Pat Mahoney at Sandia National Laboratories for help in preparation of samples.
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Nittala, K., Brennecka, G.L., Tuttle, B.A. et al. Phase evolution in solution deposited Pb-deficient PLZT thin films. J Mater Sci 46, 2148–2154 (2011). https://doi.org/10.1007/s10853-010-5051-x
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DOI: https://doi.org/10.1007/s10853-010-5051-x