Biomedical Microdevices

, Volume 10, Issue 2, pp 259–269

A lithographically-patterned, elastic multi-electrode array for surface stimulation of the spinal cord

  • Kathleen W. Meacham
  • Richard J. Giuly
  • Liang Guo
  • Shawn Hochman
  • Stephen P. DeWeerth
Article

DOI: 10.1007/s10544-007-9132-9

Cite this article as:
Meacham, K.W., Giuly, R.J., Guo, L. et al. Biomed Microdevices (2008) 10: 259. doi:10.1007/s10544-007-9132-9

Abstract

A new, scalable process for microfabrication of a silicone-based, elastic multi-electrode array (MEA) is presented. The device is constructed by spinning poly(dimethylsiloxane) (PDMS) silicone elastomer onto a glass slide, depositing and patterning gold to construct wires and electrodes, spinning on a second PDMS layer, and then micropatterning the second PDMS layer to expose electrode contacts. The micropatterning of PDMS involves a custom reactive ion etch (RIE) process that preserves the underlying gold thin film. Once completed, the device can be removed from the glass slide for conformal interfacing with neural tissue. Prototype MEAs feature electrodes smaller than those known to be reported on silicone substrate (60 μm diameter exposed electrode area) and were capable of selectively stimulating the surface of the in vitro isolated spinal cord of the juvenile rat. Stretchable serpentine traces were also incorporated into the functional PDMS-based MEA, and their implementation and testing is described.

Keywords

Poly(dimethylsiloxane)Multi-electrode arrayNeural prostheticSpinal cordNeural interfacingElectrophysiologySurface stimulationNeural controlSpinal cord injury

Copyright information

© Springer Science+Business Media, LLC 2007

Authors and Affiliations

  • Kathleen W. Meacham
    • 1
  • Richard J. Giuly
    • 1
  • Liang Guo
    • 1
  • Shawn Hochman
    • 2
  • Stephen P. DeWeerth
    • 1
  1. 1.Wallace H. Coulter Department of Biomedical EngineeringGeorgia Institute of Technology and Emory UniversityAtlantaUSA
  2. 2.Department of PhysiologyEmory University School of MedicineAtlantaUSA