Optical Review

, Volume 6, Issue 3, pp 257–260

Application of Solid Immersion Lens to Submicron Resolution Imaging of Nano-Scale Quantum Wells

  • Motoyoshi Baba
  • Masahiro Yoshita
  • Takeaki Sasaki
  • Hidefumi Akiyama
5th International Conference on NEAR FIELD OPTICS and RELATED TECHNOLOGIES (NFO-5)

DOI: 10.1007/s10043-999-0257-3

Cite this article as:
Baba, M., Yoshita, M., Sasaki, T. et al. OPT REV (1999) 6: 257. doi:10.1007/s10043-999-0257-3

Abstract

We have discussed the resolution of submicron photoluminescence (PL) imaging using a solid immersion lens (SIL), which collects an evanescent light field. We apply the SIL microscope to measure PL image of a strip-line-patterned GaAs quantum well structure at low temperature. An improved resolution beyond diffraction limit and high collection efficiency of PL are realized.

Key words

solid immersion lenssubmicron resolution imagingnano-scale quantum wellsnear-field opticsspherical aberrationspatial resolution

Copyright information

© The Optical Society of Japan 1999

Authors and Affiliations

  • Motoyoshi Baba
    • 1
  • Masahiro Yoshita
    • 1
  • Takeaki Sasaki
    • 1
  • Hidefumi Akiyama
    • 1
  1. 1.Institute for Solid State Physics, The University of TokyoTokyoJapan