Application of Solid Immersion Lens to Submicron Resolution Imaging of Nano-Scale Quantum Wells
- Cite this article as:
- Baba, M., Yoshita, M., Sasaki, T. et al. OPT REV (1999) 6: 257. doi:10.1007/s10043-999-0257-3
- 54 Downloads
We have discussed the resolution of submicron photoluminescence (PL) imaging using a solid immersion lens (SIL), which collects an evanescent light field. We apply the SIL microscope to measure PL image of a strip-line-patterned GaAs quantum well structure at low temperature. An improved resolution beyond diffraction limit and high collection efficiency of PL are realized.