Regular Papers

Optical Review

, Volume 16, Issue 2, pp 133-140

First online:

Opto-mechatronic configurations to maximize dynamic range and optimize resolution of optical instruments

  • Chih-Kung LeeAffiliated withInstitute of Applied Mechanics, National Taiwan UniversityEngineering Science and Ocean Engineering, National Taiwan UniversityIndustrial Technology Research Institute (ITRI)
  • , Tsung-Dar ChengAffiliated withInstitute of Applied Mechanics, National Taiwan University
  • , Shu-Sheng LeeAffiliated withSystems Engineering and Naval Architecture, National Taiwan Ocean University
  • , Chin-Kai ChangAffiliated withInstitute of Applied Mechanics, National Taiwan University

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We developed a new mechanical configuration which combines various optical techniques to maximize dynamic range and to optimize resolution in optical instruments. We assessed various optical configurations by looking at such variables as electronic signal processing and mechanical construction. Previous configurations developed over the last 10 years are discussed. In our new configuration, we adopted and integrated devices such as a microscopic, an interferometer, an electronic speckle pattern interferometer, and a photon tunneling microscope. We examined the impact of our new configuration on future opto-mechatronic systems design. Our new configuration can be an effective and versatile optical metrology tool for enhancing the performance of MEMS and NEMS devices.


interferometry metrology optical systems ESPI Doppler interferometer AVID