Optical Review

, Volume 10, Issue 4, pp 287–289

Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System

  • Chia-Hung Hou
  • Ming-Hung Li
  • Chii-Chang Chen
  • Jenq-Yang Chang
  • Jinn-Kong Sheu
  • Gou-Chung Chi
  • Chuck Wu
  • Wei-Tai Cheng
  • Jui-Hung Yeh
PHOTONICS AND OPTOELECTRONICS

DOI: 10.1007/s10043-003-0287-1

Cite this article as:
Hou, CH., Li, MH., Chen, CC. et al. OPT REV (2003) 10: 287. doi:10.1007/s10043-003-0287-1

Abstract

In this work, diffractive microlenses were fabricated in GaN using a gray-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AIN band- pass filter in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AIN in UV, the microlenses can potentially be used in a UV micro-optics system such as for solar-blind detection. In the design example of this work, the structure may enhance the ultaviolet/visible rejection to 102.

Key words

diffractive microlens gray-level mask GaN AIN solar-blind band-pass filter 

Copyright information

© The Optical Society of Japan 2003

Authors and Affiliations

  • Chia-Hung Hou
    • 4
  • Ming-Hung Li
    • 1
  • Chii-Chang Chen
    • 4
  • Jenq-Yang Chang
    • 4
  • Jinn-Kong Sheu
    • 1
  • Gou-Chung Chi
    • 1
  • Chuck Wu
    • 2
  • Wei-Tai Cheng
    • 3
  • Jui-Hung Yeh
    • 3
  1. 1.Department of PhysicsNational Central UniversityTaiwan, R.O.C.
  2. 2.Canyon Materials Inc.San Diego, CaliforniaU.S.A.
  3. 3.Nano-Architect Research CorporationHsin-ChuTaiwan, R.O.C.
  4. 4.Institute of Optical SciencesNational Central UniversityTaiwan, R.O.C.

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