Microsystem Technologies

, Volume 3, Issue 2, pp 42–47

Microstereophotolithography using a liquid crystal display as dynamic mask-generator

  • A. Bertsch
  • S. Zissi
  • J. Y. Jézéquel
  • S. Corbel
  • J. C. André

DOI: 10.1007/s005420050053

Cite this article as:
Bertsch, A., Zissi, S., Jézéquel, J. et al. Microsystem Technologies (1997) 3: 42. doi:10.1007/s005420050053

Abstract

 A new laser microstereophotolithography process has been developed in our laboratory to manufacture three-dimensional parts with a high accuracy. As usual in laser stereophotolithography or laser microstereophotolithography, the part is manufactured layer by layer by a light-induced space-resolved polymerization. Until now, in all the already existing microstereophotolithography devices a layer is manufactured vector by vector, by moving the part beneath the initiating light source which remains motionless. We developed a simpler and easier process, in which we can manufacture an entire layer by irradiating its whole surface only once: we used a liquid crystal display as a dynamic generator of masks. In the device we set up, we need only one mobile element, the z translator, all the others are fixed. We manufactured several different 3D microparts, in particular a piece of bevel microgearing with helicoidal cogs, the volume of which is less than half a cubic millimetre.

Copyright information

© Springer-Verlag Berlin Heidelberg 1997

Authors and Affiliations

  • A. Bertsch
    • 1
  • S. Zissi
    • 1
  • J. Y. Jézéquel
    • 1
  • S. Corbel
    • 1
  • J. C. André
    • 1
  1. 1.GdR 1080 CNRS ≪ Procédés Optiques; Applications aux Microtechniques ≫ DCPR-ENSIC-INPL, B.P. 451, F-54001 Nancy Cedex, FranceFR