Microsystem Technologies

, Volume 19, Issue 7, pp 1033–1040

A high-efficiency three-dimensional helical micromixer in fused silica

  • Keyin Liu
  • Qing Yang
  • Shengguan He
  • Feng Chen
  • Yulong Zhao
  • Xiaole Fan
  • Lei Li
  • Chao Shan
  • Hao Bian
Technical Paper

DOI: 10.1007/s00542-012-1695-6

Cite this article as:
Liu, K., Yang, Q., He, S. et al. Microsyst Technol (2013) 19: 1033. doi:10.1007/s00542-012-1695-6

Abstract

True three-dimensional (3D) micromixers in fused silica are highly desirable for efficient and compact mixing in microfluidic applications. However, realization of such devices remains technically challenging. Here, we report high-quality fabrication of 3D helical microchannels in fused silica by taking the full advantage of an improved femtosecond laser irradiation followed by chemical etching process, and a glass-PDMS interface structure is introduced for assembling 3D helical micromixer. Highly efficient mixing is achieved in the helical micromixer at low Reynolds numbers, whose excellent mixing performance is approved by the experimental evaluation and computational fluid dynamics simulation.

Supplementary material

542_2012_1695_MOESM1_ESM.doc (4.2 mb)
Supplementary material 1 (DOC 4349 kb)

Copyright information

© Springer-Verlag Berlin Heidelberg 2012

Authors and Affiliations

  • Keyin Liu
    • 1
  • Qing Yang
    • 1
  • Shengguan He
    • 1
  • Feng Chen
    • 1
  • Yulong Zhao
    • 1
  • Xiaole Fan
    • 1
  • Lei Li
    • 1
  • Chao Shan
    • 1
  • Hao Bian
    • 1
  1. 1.State Key Laboratory for Manufacturing System Engineering and Key Laboratory of Photonics Technology for Information of Shaanxi ProvinceXi’an Jiaotong UniversityXi’anPeople’s Republic of China