Technical Paper

Microsystem Technologies

, Volume 19, Issue 7, pp 1033-1040

A high-efficiency three-dimensional helical micromixer in fused silica

  • Keyin LiuAffiliated withState Key Laboratory for Manufacturing System Engineering and Key Laboratory of Photonics Technology for Information of Shaanxi Province, Xi’an Jiaotong University
  • , Qing YangAffiliated withState Key Laboratory for Manufacturing System Engineering and Key Laboratory of Photonics Technology for Information of Shaanxi Province, Xi’an Jiaotong University
  • , Shengguan HeAffiliated withState Key Laboratory for Manufacturing System Engineering and Key Laboratory of Photonics Technology for Information of Shaanxi Province, Xi’an Jiaotong University
  • , Feng ChenAffiliated withState Key Laboratory for Manufacturing System Engineering and Key Laboratory of Photonics Technology for Information of Shaanxi Province, Xi’an Jiaotong University Email author 
  • , Yulong ZhaoAffiliated withState Key Laboratory for Manufacturing System Engineering and Key Laboratory of Photonics Technology for Information of Shaanxi Province, Xi’an Jiaotong University
  • , Xiaole FanAffiliated withState Key Laboratory for Manufacturing System Engineering and Key Laboratory of Photonics Technology for Information of Shaanxi Province, Xi’an Jiaotong University
  • , Lei LiAffiliated withState Key Laboratory for Manufacturing System Engineering and Key Laboratory of Photonics Technology for Information of Shaanxi Province, Xi’an Jiaotong University
  • , Chao ShanAffiliated withState Key Laboratory for Manufacturing System Engineering and Key Laboratory of Photonics Technology for Information of Shaanxi Province, Xi’an Jiaotong University
  • , Hao BianAffiliated withState Key Laboratory for Manufacturing System Engineering and Key Laboratory of Photonics Technology for Information of Shaanxi Province, Xi’an Jiaotong University

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Abstract

True three-dimensional (3D) micromixers in fused silica are highly desirable for efficient and compact mixing in microfluidic applications. However, realization of such devices remains technically challenging. Here, we report high-quality fabrication of 3D helical microchannels in fused silica by taking the full advantage of an improved femtosecond laser irradiation followed by chemical etching process, and a glass-PDMS interface structure is introduced for assembling 3D helical micromixer. Highly efficient mixing is achieved in the helical micromixer at low Reynolds numbers, whose excellent mixing performance is approved by the experimental evaluation and computational fluid dynamics simulation.