Microsystem Technologies

, Volume 16, Issue 11, pp 1861–1868

Miniaturization limits of field-effect based MEMS accelerometers

  • Manuel Engesser
  • Oleg Jakovlev
  • Axel R. Franke
  • Jan G. Korvink
Technical Paper

DOI: 10.1007/s00542-010-1083-z

Cite this article as:
Engesser, M., Jakovlev, O., Franke, A.R. et al. Microsyst Technol (2010) 16: 1861. doi:10.1007/s00542-010-1083-z
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Abstract

Accelerometers are increasingly gaining in importance in the consumer electronics sector. To estimate whether field-effect based accelerometers have an advantage over sensor types common today, we analyze their scaling performance in this paper. Within the scope of this research, firstly we create an analytical model and subsequently verify it by numerical simulation. Based thereon, a numerical–analytical study of the scaling performance follows. The requirements are based on a commercially available capacitive accelerometer. We identify the main miniaturization limits of field-effect based accelerometers, which are total noise and pull-in effect. Those limits lead to a total area estimation for a triaxial MEMS accelerometer core of only 410 μm × 300 μm.

Copyright information

© Springer-Verlag 2010

Authors and Affiliations

  • Manuel Engesser
    • 1
  • Oleg Jakovlev
    • 1
  • Axel R. Franke
    • 1
  • Jan G. Korvink
    • 2
    • 3
  1. 1.Robert Bosch GmbHGerlingenGermany
  2. 2.Department of Microsystems Engineering (IMTEK)University of FreiburgFreiburgGermany
  3. 3.Freiburg Institute of Advanced Studies (FRIAS)University of FreiburgFreiburgGermany