Microsystem Technologies

, Volume 16, Issue 8, pp 1293–1298

Synchrotron laboratory for micro and nano devices: facility concept and design

  • Sven Achenbach
  • Venkat Subramanian
  • David Klymyshyn
  • Garth Wells
Technical Paper

DOI: 10.1007/s00542-010-1071-3

Cite this article as:
Achenbach, S., Subramanian, V., Klymyshyn, D. et al. Microsyst Technol (2010) 16: 1293. doi:10.1007/s00542-010-1071-3

Abstract

SyLMAND, the Synchrotron Laboratory for Micro and Nano Devices at the Canadian Light Source, is a new deep X-ray lithography facility focusing on spectral and beam power adjustability and large exposable area formats. We present the concept of the bend magnet beamline and its main components. A double disk intensity chopper offers the unique capability of continuous average beam power reduction to a range between 261 W and approximately 0.1 W without affecting the spectrum. Continuous spectral tuning between 1–2 keV and >15 keV photon energy is achieved using a double mirror system and low atomic number pre-filters. The radiation fan is more than 150 mm wide, allowing for full 6″ wafer exposure under vacuum conditions. We furthermore describe the vacuum window concept that was required as a result of the large exposure area and broad spectral tunability.

Copyright information

© Springer-Verlag 2010

Authors and Affiliations

  • Sven Achenbach
    • 1
    • 3
    • 4
  • Venkat Subramanian
    • 2
  • David Klymyshyn
    • 1
    • 3
  • Garth Wells
    • 2
  1. 1.Department of Electrical and Computer EngineeringUniversity of SaskatchewanSaskatoonCanada
  2. 2.Canadian Light Source Inc.SaskatoonCanada
  3. 3.TRLabsSaskatoonCanada
  4. 4.Karlsruhe Institute of TechnologyKarlsruheGermany