3D System-on-Chip technologies for More than Moore systems
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- Ramm, P., Klumpp, A., Weber, J. et al. Microsyst Technol (2010) 16: 1051. doi:10.1007/s00542-009-0976-1
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3D integration is a key solution to the predicted performance problems of future ICs as well as it offers extreme miniaturization and cost-effective fabrication of More than Moore products. Through silicon via (TSV) technologies enable high interconnect performance compared to 3D packaging. At present TSVs are associated with a relatively high fabrication cost, but research world wide strive to bring the cost down to an acceptable level. An example of a 3D System-on-Chip (3D-SOC) technology is to introduce a post backend-of-line TSV process as an optimized technology for heterogeneous system integration. The introduced ICV-SLID process, that combines both TSVs and bonding, enables 3D integration of fabricated devices. Reliability issues related to thermo-mechanical stress caused by the TSV formation and the bonding are considered. 3D-SOC technology choices made to realize a heterogeneous ultra-small IC stack for a wireless tire pressure monitoring system (TPMS) as an automotive application are described.