Microsystem Technologies

, Volume 16, Issue 8, pp 1287–1292

First automated production line for X-ray-LIGA (FELIG) is brought on line

  • Lothar Hahn
  • Georg Schwartz
  • Volker Saile
  • Joachim Schulz
Technical Paper

DOI: 10.1007/s00542-009-0953-8

Cite this article as:
Hahn, L., Schwartz, G., Saile, V. et al. Microsyst Technol (2010) 16: 1287. doi:10.1007/s00542-009-0953-8

Abstract

The project FELIG sets a milestone in X-ray-LIGA technology. The first automated LIGA production is brought online. The units have been implemented at the synchrotron source ANKA at Forschunszentrum Karlsruhe. They are linked via a conveyor line and controlled by a superior software system. Other process steps as resist technique have been partly automated. The whole process has been adapted to a wafer format of 6″. Automation and enlargement of formats will reduce production costs for LIGA components and help LIGA technique for industrial breakthrough.

Copyright information

© Springer-Verlag 2009

Authors and Affiliations

  • Lothar Hahn
    • 1
  • Georg Schwartz
    • 2
  • Volker Saile
    • 1
  • Joachim Schulz
    • 1
  1. 1.Institut für MikrostrukturtechnikKarlsruher Institut für Technologie (KIT)Eggenstein-LeopoldshafenGermany
  2. 2.Institut für Angewandte Informatik/AutomatisierungstechnikKarlsruher Institut für Technologie (KIT)Eggenstein-LeopoldshafenGermany

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