, Volume 16, Issue 8-9, pp 1287-1292
Date: 01 Dec 2009

First automated production line for X-ray-LIGA (FELIG) is brought on line

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Abstract

The project FELIG sets a milestone in X-ray-LIGA technology. The first automated LIGA production is brought online. The units have been implemented at the synchrotron source ANKA at Forschunszentrum Karlsruhe. They are linked via a conveyor line and controlled by a superior software system. Other process steps as resist technique have been partly automated. The whole process has been adapted to a wafer format of 6″. Automation and enlargement of formats will reduce production costs for LIGA components and help LIGA technique for industrial breakthrough.