Microsystem Technologies

, 15:1879

A nano-metrology system with a two-dimensional combined optical and X-ray interferometer and an atomic force microscope

Technical Paper

DOI: 10.1007/s00542-009-0916-0

Cite this article as:
Park, J., Lee, M. & Lee, D. Microsyst Technol (2009) 15: 1879. doi:10.1007/s00542-009-0916-0


A two-dimensional nano-scale measuring system utilizing a two-dimensional combined optical and X-ray interferometer (2D COXI) was developed for the standardization of measurement in the nanometer region. The system consists of a 2D COXI and an atomic force microscope (AFM). The designed, two-dimensional, flexure-stage scans and the cantilever tip probes the nano-structure of the specimen. The calibrated optical interferometers in the 2D COXI were used to measure two-dimensional nano-scale lengths. The accuracy of the optical interferometers was enhanced to enable sub-nanometer measurements. To demonstrate the nano-scale measuring system, we used it to measure the nano-scale pitches of gratings.

Copyright information

© Springer-Verlag 2009

Authors and Affiliations

  1. 1.Manufacturing Engineering CenterSamsung Electro-Mechanics Co., LtdSuwonRepublic of Korea
  2. 2.Department of Mechanical EngineeringKorea UniversitySeoulRepublic of Korea
  3. 3.School of Mechanical EngineeringYeungnam UniversityGyeongsan-siRepublic of Korea