Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers
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- Bouyge, D., Crunteanu, A., Sabourdy, D. et al. Microsyst Technol (2007) 13: 1607. doi:10.1007/s00542-006-0340-7
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We present a simple technique to produce active Q-switching in various types of fiber amplifiers by active integration of electrostatic actuated deformable metallic micro-mirrors. The optical MEMS (MOEMS) device acts as one of the laser cavity reflectors and, at the same time, as switching/modulator element. We aim to obtain laser systems emitting short, high-power pulses and having variable repetition rate. The electro-mechanical behavior of bridge-type membranes was simulated by using electrostatic and modal 3D finite element analysis (FEA). The results of the simulations fit well with the experimental mechanical, electrical and thermal measurements of the components. In order to decrease the sensitiveness to fiber-mirror alignment we are developing novel optical devices based on stressed-metal cantilever-type geometry that allow mirror deflections up to 50 μm with increased reflectivity discrimination during actuation.