Microsystem Technologies

, Volume 13, Issue 5, pp 487–493

Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures

  • K. D. Vora
  • A. G. Peele
  • B.-Y. Shew
  • E. C. Harvey
  • J. P. Hayes
Technical paper

DOI: 10.1007/s00542-006-0201-4

Cite this article as:
Vora, K.D., Peele, A.G., Shew, BY. et al. Microsyst Technol (2007) 13: 487. doi:10.1007/s00542-006-0201-4

Abstract

We have previously demonstrated that it is possible to fabricate densely-packed high aspect ratio structures in SU-8 by means of a top-plate support member which stiffens the overall structure and prevents pattern collapse. In this work we have computed the tensile stresses induced in the top-plate structures due to the capillary forces that arise between the columns due to the surface tension of the drying liquid. We have further studied the dynamic behavior of the structure after an instantaneous force. Based on these results, we have shown that the predicted optimal thickness of the top-plate structure is sufficient to maintain structural integrity.

Keywords

Deep X-ray lithographyDensely packed high aspect ratio structuresStiction

Copyright information

© Springer-Verlag 2006

Authors and Affiliations

  • K. D. Vora
    • 1
  • A. G. Peele
    • 1
  • B.-Y. Shew
    • 2
  • E. C. Harvey
    • 3
  • J. P. Hayes
    • 3
  1. 1.Department of PhysicsLa Trobe UniversityBundooraAustralia
  2. 2.Device Technology GroupNational Synchrotron Radiation Research CenterHsinchu SBI ParkTaiwan
  3. 3.Industrial Research Institute of SwinburneSwinburne University of TechnologyHawthornAustralia