Microsystem Technologies

, Volume 12, Issue 1, pp 82–90

Fabrication of microlens array with graduated sags using UV proximity printing method

Technical paper

DOI: 10.1007/s00542-005-0025-7

Cite this article as:
Yang, H., Chao, C., Lin, T. et al. Microsyst Technol (2005) 12: 82. doi:10.1007/s00542-005-0025-7

Abstract

A graduated microlens array is presented in this paper. The proposed device has the same aperture microlens with a gradually increasing sag in the substrate. The design produces gradual decrease in the focal length and intensity when the light passes through the graduated microlens array. This paper presents a new graduated microlens array fabrication method that uses a variable printing gap in the UV lithography process. This method can precisely control the geometric profile of each microlens array without using the thermal reflow process. The angles between the mask and photoresist were placed at 5°, 8°, 10°, 15°, and 20° using a fixture designed in this study. The mask patterns were ellipses with an isosceles triangle arrangement to compensate for the partial geometry.

Keywords

Microlens arrayUV proximity printingGradual sag heightMicro-optics

Copyright information

© Springer-Verlag 2005

Authors and Affiliations

  1. 1.Institute of Precision EngineeringNational Chung Hsing UniversityTaichungTaiwan
  2. 2.Department of Mechanical EngineeringNational Taiwan University of Science and TechnologyTaipeiTaiwan
  3. 3.Department of Mechanical EngineeringNan Kai Institute of TechnologyNantouTaiwan