, Volume 11, Issue 2-3, pp 80-85

Casimir effect on the pull-in parameters of nanometer switches

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Abstract

Casimir effect on the critical pull-in gap and pull-in voltage of nanoelectromechanical switches is studied. An approximate analytical expression of the critical pull-in gap with Casimir force is presented by the perturbation theory. The corresponding pull-in parameters are computed numerically, from which one can notice the nonlinear effect of Casimir force on the pull-in parameters. The detachment length has been presented, which increases with increasing thickness of the beam.

This work was supported by the Distinguished Young Scholar Fund of NSFC (Grant No. 10225209), key project from the Chinese Academy of Sciences (Grant No. KJCX2-SW-L2) and National ‘973’ Project (No. G1999033103).