Casimir effect on the pull-in parameters of nanometer switches
- Cite this article as:
- Lin, W. & Zhao, Y. Microsystem Technologies (2005) 11: 80. doi:10.1007/s00542-004-0411-6
Casimir effect on the critical pull-in gap and pull-in voltage of nanoelectromechanical switches is studied. An approximate analytical expression of the critical pull-in gap with Casimir force is presented by the perturbation theory. The corresponding pull-in parameters are computed numerically, from which one can notice the nonlinear effect of Casimir force on the pull-in parameters. The detachment length has been presented, which increases with increasing thickness of the beam.