Microsystem Technologies

, Volume 10, Issue 10, pp 706–710

Incorporating design rules into the LIGA technology applied to a fourier transformation spectrometer

  • C. Solf
  • A. Janssen
  • J. Mohr
  • A. Ruzzu
  • U. Wallrabe
Article

DOI: 10.1007/s00542-004-0406-3

Cite this article as:
Solf, C., Janssen, A., Mohr, J. et al. Microsystem Technologies (2004) 10: 706. doi:10.1007/s00542-004-0406-3

Abstract

For very complex systems made with the LIGA technology, manufacturing and subsequently yield problems may arise if the aspects of the manufacturing are not already considered in the design process. To enable the designers to make manufacturable designs collections of design rules as could be found in [1] are very useful. The rules can be utilized to make better, more production oriented designs, which will ease manufacturing and subsequently boost the yield. As an example the following paper presents a novel miniaturized Fourier Transformation Spectrometer which was designed following design recommendations that can be found in the literature. The applied rules are explained and the obtained results are discussed. We observed a very high yield in the pure LIGA process steps and an outstanding robustness of the integrated electromagnetic actuator.

Copyright information

© Springer-Verlag Berlin Heidelberg 2004

Authors and Affiliations

  • C. Solf
    • 1
  • A. Janssen
    • 1
  • J. Mohr
    • 1
  • A. Ruzzu
    • 2
  • U. Wallrabe
    • 1
  1. 1.Forschungszentrum Karlsruhe GmbHInstitute for Microstructure TechnologyKarlsruheGermany
  2. 2.ABB AG ForschungszentrumHeidelbergGermany