Development of a micro-opto-mechanical accelerometer based on intensity modulation
- Cite this article as:
- Lee, S. & Cho, DW. Microsystem Technologies (2004) 10: 147. doi:10.1007/s00542-003-0324-9
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Accelerometers are most frequently used to monitor machining states, and are therefore crucial for automated and unmanned plant operations. In such a harsh environment, micro-accelerometers based on optical methods can be effective. This paper presents a new type of micro-opto-mechanical accelerometer that was developed using a combination of new technologies, such as deep reactive ion etching (DRIE), micro-stereolithography, and intensity modulation. The advantages of intensity modulation include the simplicity of the detection principle and the lack of a requirement for a high-quality light source. This paper reports the design of two types of micro-accelerometer using the finite element method. Experiments showed that the fabricated micro-accelerometers had resonant frequencies of approximately 2 and 10 kHz, with suitable linear ranges and sensitivities. The developed micro-opto-mechanical accelerometers can thus be used for various practical purposes, including machining state monitoring in automated and unmanned plant operations.