Microsystem Technologies

, Volume 10, Issue 2, pp 147–154

Development of a micro-opto-mechanical accelerometer based on intensity modulation


DOI: 10.1007/s00542-003-0324-9

Cite this article as:
Lee, S. & Cho, DW. Microsystem Technologies (2004) 10: 147. doi:10.1007/s00542-003-0324-9


Accelerometers are most frequently used to monitor machining states, and are therefore crucial for automated and unmanned plant operations. In such a harsh environment, micro-accelerometers based on optical methods can be effective. This paper presents a new type of micro-opto-mechanical accelerometer that was developed using a combination of new technologies, such as deep reactive ion etching (DRIE), micro-stereolithography, and intensity modulation. The advantages of intensity modulation include the simplicity of the detection principle and the lack of a requirement for a high-quality light source. This paper reports the design of two types of micro-accelerometer using the finite element method. Experiments showed that the fabricated micro-accelerometers had resonant frequencies of approximately 2 and 10 kHz, with suitable linear ranges and sensitivities. The developed micro-opto-mechanical accelerometers can thus be used for various practical purposes, including machining state monitoring in automated and unmanned plant operations.

Copyright information

© Springer-Verlag Berlin Heidelberg 2004

Authors and Affiliations

  1. 1.Department of Mechanical EngineeringPohang University of Science and TechnologyKyungbukKorea