Microsystem Technologies

, Volume 8, Issue 1, pp 32-36

Polymer microfabrication technologies

  • O. RöttingAffiliated withMILDENDO GmbH, Göschwitzer Str. 40, D-07745 Jena, Germany E-mail: oliver.roetting@jenoptik.com
  • , W. RöpkeAffiliated withMILDENDO GmbH, Göschwitzer Str. 40, D-07745 Jena, Germany E-mail: oliver.roetting@jenoptik.com
  • , H. BeckerAffiliated withMILDENDO GmbH, Göschwitzer Str. 40, D-07745 Jena, Germany E-mail: oliver.roetting@jenoptik.com
  • , C. GärtnerAffiliated withApplikationszentrum Mikrotechnik Jena, Otto-Schott-Str. 13, D-07743 Jena, Germany

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Abstract

 The need for low-cost microfabrication technologies in modern life-sciences is described. The article compares the replication technologies, hot embossing and micro-injection moulding and gives an overview over the technologies used for fabrication of the replication masters. The back-end processes transforming the replicated plastic part into a complete microsystem are described. Some manufacturing issues of mass production are discussed.