High aspect ratio microstructures based on anisotropic porous materials
- Cite this article as:
- Müller, F., Birner, A., Schilling, J. et al. Microsystem Technologies (2002) 8: 7. doi:10.1007/s00542-002-0047-3
Structures with high aspect ratios have been prepared by exploiting the high built-in anisotropy of some porous materials. For the structuring of these materials with nearly arbitrary shapes only standard lithography and isotropic etching is needed. We demonstrate the power of this technique for macroporous silicon and porous anodic alumina. Structures with sub-micrometer precision and aspect ratios above 100 are shown.