, Volume 73, Issue 5-6, pp 603-608

Vertically and laterally waveguide-coupled cylindrical microresonators in Si3N4 on SiO2 technology

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High-finesse laterally and vertically waveguide-coupled cylindrical microresonators have been designed and realized in Si3N4 on SiO2 technology using conventional optical lithography. Based on the experimental results and detailed simulations, a comparison between the lateral and vertical coupling schemes is made.

Received: 16 May 2001 / Revised version: 13 August 2001 / Published online: 2 November 2001