Applied Physics B

, Volume 73, Issue 5, pp 623–627

Metallic waveguide mirrors in polymer film waveguides

  • S. Wolff
  • A.R. Giehl
  • M. Renno
  • H. Fouckhardt
Article

DOI: 10.1007/s003400100662

Cite this article as:
Wolff, S., Giehl, A., Renno, M. et al. Appl Phys B (2001) 73: 623. doi:10.1007/s003400100662

Abstract

A technology for the fabrication of metallic waveguide mirrors is developed. Plane and curved waveguide mirrors, the latter acting in the same way as cylindrical lenses, are realized in benzocyclobutene (BCB) film waveguides. The waveguide mirror structure is dry-etched into the BCB film waveguide. To enhance the reflectivity of the waveguide mirrors, the waveguide edge is metallized. The BCB film waveguide mirrors are characterized with respect to waveguide attenuation and mirror reflectivity. The waveguide attenuation of the processed BCB waveguide is 0.5 dB/cm. Ag-coated BCB waveguide mirrors show a reflectivity of 71%. The efficiency of total internal reflection (TIR, i.e. in the case without metallization) at the dry-etched waveguide edge is 74%. As an application of the BCB waveguide mirrors a hybrid integrated optical module for Fourier-optical transverse mode selection in broad area lasers (BAL) is proposed.

PACS: 42.82.Cr; 42.70.Jk; 42.55.Px

Copyright information

© Springer-Verlag 2001

Authors and Affiliations

  • S. Wolff
    • 1
  • A.R. Giehl
    • 1
  • M. Renno
    • 1
  • H. Fouckhardt
    • 1
  1. 1.AG Integrierte Optoelektronik und Mikrooptik, Fachbereich Physik, Universität Kaiserslautern, Erwin-Schrödinger-Strasse, 67663 Kaiserslautern, GermanyDE