Applied Physics B

, Volume 100, Issue 2, pp 321–329

Spectral and modulation properties of a largely tunable MEMS-VCSEL in view of gas phase spectroscopy applications

Authors

    • IR Microsystems SA, PSE-C
  • K. Zogal
    • Fachgebiet Optische NachrichtentechnikTechnische Universität Darmstadt
  • B. Kögel
    • Fachgebiet Optische NachrichtentechnikTechnische Universität Darmstadt
  • P. Meissner
    • Fachgebiet Optische NachrichtentechnikTechnische Universität Darmstadt
  • M. Maute
    • Walter Schottky InstitutTechnische Universität München
  • R. Protasio
    • IR Microsystems SA, PSE-C
  • M.-C. Amann
    • Walter Schottky InstitutTechnische Universität München
Article

DOI: 10.1007/s00340-010-3898-9

Cite this article as:
Schilt, S., Zogal, K., Kögel, B. et al. Appl. Phys. B (2010) 100: 321. doi:10.1007/s00340-010-3898-9

Abstract

An extensive characterization of the spectral properties of a largely tunable laser in the 1.56-μm spectral range is reported. This device combines a vertical-cavity surface-emitting laser (VCSEL) with a micro-machined (MEMS) Bragg mirror in a very compact arrangement. The large tunability obtained by an electro-thermal actuation of the MEMS mirror makes this device very attractive for high-resolution spectroscopy. Relevant laser parameters for the implementation of wavelength modulation spectroscopy techniques in gas sensing, such as tuning and modulation properties, are presented. A preliminary gas spectroscopy experiment performed with this laser is also shown.

Copyright information

© Springer-Verlag 2010