Spectral and modulation properties of a largely tunable MEMS-VCSEL in view of gas phase spectroscopy applications
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- Schilt, S., Zogal, K., Kögel, B. et al. Appl. Phys. B (2010) 100: 321. doi:10.1007/s00340-010-3898-9
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An extensive characterization of the spectral properties of a largely tunable laser in the 1.56-μm spectral range is reported. This device combines a vertical-cavity surface-emitting laser (VCSEL) with a micro-machined (MEMS) Bragg mirror in a very compact arrangement. The large tunability obtained by an electro-thermal actuation of the MEMS mirror makes this device very attractive for high-resolution spectroscopy. Relevant laser parameters for the implementation of wavelength modulation spectroscopy techniques in gas sensing, such as tuning and modulation properties, are presented. A preliminary gas spectroscopy experiment performed with this laser is also shown.