Applied Physics B

, Volume 100, Issue 2, pp 321–329

Spectral and modulation properties of a largely tunable MEMS-VCSEL in view of gas phase spectroscopy applications

  • S. Schilt
  • K. Zogal
  • B. Kögel
  • P. Meissner
  • M. Maute
  • R. Protasio
  • M.-C. Amann
Article

DOI: 10.1007/s00340-010-3898-9

Cite this article as:
Schilt, S., Zogal, K., Kögel, B. et al. Appl. Phys. B (2010) 100: 321. doi:10.1007/s00340-010-3898-9

Abstract

An extensive characterization of the spectral properties of a largely tunable laser in the 1.56-μm spectral range is reported. This device combines a vertical-cavity surface-emitting laser (VCSEL) with a micro-machined (MEMS) Bragg mirror in a very compact arrangement. The large tunability obtained by an electro-thermal actuation of the MEMS mirror makes this device very attractive for high-resolution spectroscopy. Relevant laser parameters for the implementation of wavelength modulation spectroscopy techniques in gas sensing, such as tuning and modulation properties, are presented. A preliminary gas spectroscopy experiment performed with this laser is also shown.

Copyright information

© Springer-Verlag 2010

Authors and Affiliations

  • S. Schilt
    • 1
  • K. Zogal
    • 3
  • B. Kögel
    • 3
  • P. Meissner
    • 3
  • M. Maute
    • 5
  • R. Protasio
    • 1
  • M.-C. Amann
    • 5
  1. 1.IR Microsystems SA, PSE-CLausanneSwitzerland
  2. 2.Laboratory for Time and Frequency, Institute of PhysicsUniversity of NeuchâtelNeuchâtelSwitzerland
  3. 3.Fachgebiet Optische NachrichtentechnikTechnische Universität DarmstadtDarmstadtGermany
  4. 4.Department of Microtechnology and NanoscienceChalmers University of TechnologyGöteborgSweden
  5. 5.Walter Schottky InstitutTechnische Universität MünchenGarchingGermany