Article

Applied Physics B

, Volume 94, Issue 2, pp 295-299

Enhanced refractive index well-confined planar and channel waveguides in KTiOPO4 produced by MeV C3+ ion implantation with low dose

  • L.-L. WangAffiliated withSchool of Physics, Shandong UniversityDepartment of Physics, Jining University
  • , K.-M. WangAffiliated withSchool of Physics, Shandong UniversityState Key Laboratory of Crystal Materials, Shandong University Email author 
  • , Q.-M. LuAffiliated withSchool of Chemistry and Chemical Engineering, Shandong University
  • , H.-J. MaAffiliated withThe State Key Laboratory of Nuclear Physics and Technology, Peking University

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Abstract

We report on the fabrication and characterization of planar and channel waveguides in KTiOPO4 crystals by 6.0 MeV C3+ ion implantation with the dose of 1×1014 ions/cm2. The dark mode spectroscopy of the planar waveguide was measured using a prism coupling arrangement. An increase of the both n x and n y refractive indices induced by the annealing after implantation is believed to be responsible for waveguide formation. The bright near-field intensity distribution of the transverse-electric and transverse-magnetic modes in the annealed channel waveguide was collected and studied by end-coupling method.

PACS

42.82Et 61.80Jh