128 channels of integrated filter array rapidly fabricated by using the combinatorial deposition technique
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- Wang, SW., Li, M., Xia, CS. et al. Appl. Phys. B (2007) 88: 281. doi:10.1007/s00340-007-2726-3
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A combinatorial deposition technique is developed to fabricate integrated narrow bandpass filters (NBPFs) on a single substrate. It is highly efficient for the fabrication of integrated filter arrays in optical regions. An array integrated with 128 NBPFs has been fabricated by using the technique in a nine-step deposition process. The pass bands of the filters distribute almost linearly in the range of 722.0∼880.0 nm. The relative bandwidth of the pass bands is smaller than 0.44%. Such a NBPF array can be utilized as a wavelength division component in many optical applications. It is very powerful for the miniaturization of relevant apparatuses.