Applied Physics B

, Volume 88, Issue 2, pp 281–284

128 channels of integrated filter array rapidly fabricated by using the combinatorial deposition technique

  • S.-W. Wang
  • M. Li
  • C.-S. Xia
  • H.-Q. Wang
  • X.-S. Chen
  • W. Lu
Article

DOI: 10.1007/s00340-007-2726-3

Cite this article as:
Wang, SW., Li, M., Xia, CS. et al. Appl. Phys. B (2007) 88: 281. doi:10.1007/s00340-007-2726-3

Abstract

A combinatorial deposition technique is developed to fabricate integrated narrow bandpass filters (NBPFs) on a single substrate. It is highly efficient for the fabrication of integrated filter arrays in optical regions. An array integrated with 128 NBPFs has been fabricated by using the technique in a nine-step deposition process. The pass bands of the filters distribute almost linearly in the range of 722.0∼880.0 nm. The relative bandwidth of the pass bands is smaller than 0.44%. Such a NBPF array can be utilized as a wavelength division component in many optical applications. It is very powerful for the miniaturization of relevant apparatuses.

Copyright information

© Springer-Verlag 2007

Authors and Affiliations

  • S.-W. Wang
    • 1
  • M. Li
    • 2
  • C.-S. Xia
    • 1
  • H.-Q. Wang
    • 2
  • X.-S. Chen
    • 1
  • W. Lu
    • 1
  1. 1.National Laboratory for Infrared Physics, Shanghai Institute of Technical PhysicsChinese Academy of SciencesShanghaiP.R. China
  2. 2.Hefei National Laboratory for Physical Science at Microscale, and USTC-Shincron Joint LaboratoryUniversity of Science and Technology of ChinaHefeiP.R. China

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