Applied Physics B

, Volume 80, Issue 1, pp 27–30

100-kHz diffraction-limited femtosecond laser micromachining

  • N. Sanner
  • N. Huot
  • E. Audouard
  • C. Larat
  • P. Laporte
  • J.P. Huignard
Rapid communication

DOI: 10.1007/s00340-004-1697-x

Cite this article as:
Sanner, N., Huot, N., Audouard, E. et al. Appl. Phys. B (2005) 80: 27. doi:10.1007/s00340-004-1697-x

Abstract

We demonstrate active and adaptive wavefront correction of a 100-kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid-crystal modulator, phase-front distortions are decreased down to λ/15 peak–valley and λ/100 rms. Clean 1.7-μm diffraction-limited microholes are obtained, both on low-threshold metallic and high-threshold dielectric materials. This high beam quality femtosecond source enables diffraction-limited high-speed micromachining.

Copyright information

© Springer-Verlag 2004

Authors and Affiliations

  • N. Sanner
    • 1
  • N. Huot
    • 1
  • E. Audouard
    • 1
  • C. Larat
    • 2
  • P. Laporte
    • 1
  • J.P. Huignard
    • 2
  1. 1.Laboratoire Traitement du Signal et InstrumentationSaint-EtienneFrance
  2. 2.Thalès Research and TechnologyOrsay CedexFrance

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