100-kHz diffraction-limited femtosecond laser micromachining
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- Sanner, N., Huot, N., Audouard, E. et al. Appl. Phys. B (2005) 80: 27. doi:10.1007/s00340-004-1697-x
We demonstrate active and adaptive wavefront correction of a 100-kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid-crystal modulator, phase-front distortions are decreased down to λ/15 peak–valley and λ/100 rms. Clean 1.7-μm diffraction-limited microholes are obtained, both on low-threshold metallic and high-threshold dielectric materials. This high beam quality femtosecond source enables diffraction-limited high-speed micromachining.