Applied Physics B

, Volume 76, Issue 1, pp 17–21

Effects of a prepulse on laser-induced EUV radiation conversion efficiency

Authors

  • S. Düsterer
    • Institut für Optik und Quantenelektronik, Friedrich-Schiller-Universität, Max-Wien-Platz 1, 07743 Jena, Germany
  • H. Schwoerer
    • Institut für Optik und Quantenelektronik, Friedrich-Schiller-Universität, Max-Wien-Platz 1, 07743 Jena, Germany
  • W. Ziegler
    • Institut für Optik und Quantenelektronik, Friedrich-Schiller-Universität, Max-Wien-Platz 1, 07743 Jena, Germany
  • D. Salzmann
    • Department of Applied Physics, Soreq NRC, Yavne, Israel 81800
  • R. Sauerbrey
    • Institut für Optik und Quantenelektronik, Friedrich-Schiller-Universität, Max-Wien-Platz 1, 07743 Jena, Germany

DOI: 10.1007/s00340-002-1071-9

Cite this article as:
Düsterer, S., Schwoerer, H., Ziegler, W. et al. Appl Phys B (2003) 76: 17. doi:10.1007/s00340-002-1071-9
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Abstract.

The influence of prepulses on the conversion efficiency (CE) of laser radiation into 13 nm extreme ultraviolet (EUV) radiation, resulting from lithium-like oxygen ions from O20 μm water droplets, was investigated. The laser pulse durations in the experiment ranged from 200 fs to 120 ps. Applying prepulses preceding the main pulse at various delays of up to 11 ns, it was shown that the CE increases differently for each measured pulse duration. The strongest dependence on the introduction of a prepulse was observed for 2 ps laser pulses with a 20 mJ laser pulse energy. The EUV CE was improved by a factor of 15 by the introduction of a prepulse. Calculations on the atomic physics of oxygen ions and simulations of the laser–plasma interaction revealed the influence of the prepulse on the EUV yield.

PACS: 52.38.-r; 52.50.Jm; 52.65.-y
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© Springer-Verlag 2003