Pulse-parameter dependence of the configuration characteristics of a micro-structure in fused SiO2 induced by femtosecond laser pulses
- Cite this article as:
- Luo, L., Li, C., Wang, D. et al. Appl Phys A (2002) 74: 497. doi:10.1007/s003390100901
The fabrication of a micro-structures in fused SiO2 by femtosecond laser pulses was studied in the range of pulse duration 150∼500 fs, pulse energy 60 nJ to ∼7 μJ and wavelengths 400 nm and 800 nm. The characteristics of the cross section of the micro-structure were explained with the multiphoton-ionization and avalanche-ionization processes in the femtosecond laser-induced breakdown. The characteristics of the longitudinal length of the micro-structure relating to the direct-focusing and self-action effects are also discussed.