Applied Physics A

, Volume 69, Supplement 1, pp S883–S886

Ultra high repetition rate (133 MHz) laser ablation of aluminum with 1.2-ps pulses

  • M. Lapczyna
  • K.P. Chen
  • P.R. Herman
  • H.W. Tan
  • R.S. Marjoribanks

DOI: 10.1007/s003390051552

Cite this article as:
Lapczyna, M., Chen, K., Herman, P. et al. Appl Phys A (1999) 69: S883. doi:10.1007/s003390051552

Abstract.

This study reports on the multi-pulse ablation of aluminum foils by bursts of mode-locked pulses from a feedback-controlled Nd:glass laser (1054 nm). The 2-μs train consists of about 250 pulses of 1.2 ps duration and 7.5 ns pulse-to-pulse separation. The bursts provide a new mode of laser fluence delivery, combining long-pulse heating with the advantages of ultrashort laser material interactions. Results show that clean through-holes can be cut through 200-μm foils with a single pulse train. In holes produced using near-threshold machining, a 7:1 aspect ratio was observed with a taper half-angle of around 3°. The etch depths and surface morphology of the processed surfaces are qualitatively characterized for fluences between 80 J/cm2 and 9 kJ/cm2, and for a range of foil thicknesses 12.5–200 μm.

PACS: 81.15 Fg; 79.20Ds

Copyright information

© Springer-Verlag 1999

Authors and Affiliations

  • M. Lapczyna
    • 1
  • K.P. Chen
    • 1
  • P.R. Herman
    • 1
  • H.W. Tan
    • 2
  • R.S. Marjoribanks
    • 2
  1. 1.Department of Electrical and Computer Engineering, University of Toronto, Toronto, ON, M5S 3G4, Canada (Fax: +1-416/971-3020, E-mail: lapco@ecf.utoronto.ca)CA
  2. 2.Department of Physics, University of Toronto, Toronto, ON, M5S 1A7, Canada CA