, Volume 69, Issue 1 Supplement, pp S883-S886

Ultra high repetition rate (133 MHz) laser ablation of aluminum with 1.2-ps pulses

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Abstract.

This study reports on the multi-pulse ablation of aluminum foils by bursts of mode-locked pulses from a feedback-controlled Nd:glass laser (1054 nm). The 2-μs train consists of about 250 pulses of 1.2 ps duration and 7.5 ns pulse-to-pulse separation. The bursts provide a new mode of laser fluence delivery, combining long-pulse heating with the advantages of ultrashort laser material interactions. Results show that clean through-holes can be cut through 200-μm foils with a single pulse train. In holes produced using near-threshold machining, a 7:1 aspect ratio was observed with a taper half-angle of around 3°. The etch depths and surface morphology of the processed surfaces are qualitatively characterized for fluences between 80 J/cm2 and 9 kJ/cm2, and for a range of foil thicknesses 12.5–200 μm.

Received: 21 July 1999 / Accepted: 5 October 1999 / Published online: 28 December 1999