Applied Physics A

, Volume 69, Supplement 1, pp S633–S636

High rate deep channel ablative formation by picosecond–nanosecond combined laser pulses

  • S.M. Klimentov
  • S.V. Garnov
  • T.V. Kononenko
  • V.I. Konov
  • P.A. Pivovarov
  • F. Dausinger

DOI: 10.1007/s003390051493

Cite this article as:
Klimentov, S., Garnov, S., Kononenko, T. et al. Appl Phys A (1999) 69(Suppl 1): S633. doi:10.1007/s003390051493

Abstract.

Temporally profiled pulsed radiation of the Nd:YAG laser was applied to drilling and micromachining of ceramics, steel, and CVD diamond, demonstrating one or two orders of magnitude enhancement of ablation rates compared to conventional pico- and nanosecond-pulsed ablation at the same energy density. The developed laser system delivered combined pulses consisting of a picosecond pulse train followed by a nanosecond pulse train. The combination of picosecond and nanosecond components within one laser shot turned out to be especially beneficial for high-aspect-ratio channel formation. Polarization dependence of the ablated deep crater morphology was observed in AlN samples. Waveguide radiation propagation in self-made deep channels as well as the influence of high-temperature laser-produced plasma on this phenomena are discussed.

PACS: 42.62.Cf; 42.60.By 

Copyright information

© Springer-Verlag 1999

Authors and Affiliations

  • S.M. Klimentov
    • 1
  • S.V. Garnov
    • 1
  • T.V. Kononenko
    • 1
  • V.I. Konov
    • 1
  • P.A. Pivovarov
    • 1
  • F. Dausinger
    • 2
  1. 1.General Physics Institute of the Russian Academy of Sciences, 117942 Moscow, Vavilov str. 38 (Fax: +7-095/234-9022, E-mail: kliment@kapella.gpi.ru)RU
  2. 2.Institut für Strahlwerkzeuge, Pfaffenwaldring 43, D-70569 Stuttgart, Germany (Fax: +49-0711/685-6842)DE