Applied Physics A

, Volume 66, Supplement 1, pp S65–S69

Micromachined fabrication of Si cantilevers with Schottky diodes integrated in the tip

  • T. Leinhos
  • M. Stopka
  • E. Oesterschulze
Regular paper

DOI: 10.1007/s003390051101

Cite this article as:
Leinhos, T., Stopka, M. & Oesterschulze, E. Appl Phys A (1998) 66: S65. doi:10.1007/s003390051101

PACS: 07.79; 07.79.L; 06.70; 73.40.N

Copyright information

© Springer-Verlag 1998

Authors and Affiliations

  • T. Leinhos
    • 1
  • M. Stopka
    • 1
  • E. Oesterschulze
    • 1
  1. 1.Institute of Technical Physics, University of Kassel, Heinrich-Plett-Strasse 40, D-34109 Kassel, Germany (Fax: +49-561/804-4136, E-mail: oester@physik.uni-kassel.de)DE