Regular paper

Applied Physics A

, Volume 66, Issue 1, pp S65-S69

Micromachined fabrication of Si cantilevers with Schottky diodes integrated in the tip

  • T. LeinhosAffiliated withInstitute of Technical Physics, University of Kassel, Heinrich-Plett-Strasse 40, D-34109 Kassel, Germany (Fax: +49-561/804-4136, E-mail: oester@physik.uni-kassel.de)
  • , M. StopkaAffiliated withInstitute of Technical Physics, University of Kassel, Heinrich-Plett-Strasse 40, D-34109 Kassel, Germany (Fax: +49-561/804-4136, E-mail: oester@physik.uni-kassel.de)
  • , E. OesterschulzeAffiliated withInstitute of Technical Physics, University of Kassel, Heinrich-Plett-Strasse 40, D-34109 Kassel, Germany (Fax: +49-561/804-4136, E-mail: oester@physik.uni-kassel.de)

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PACS: 07.79; 07.79.L; 06.70; 73.40.N