A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors
- Cite this article as:
- Lang, H., Berger, R., Battiston, F. et al. Appl Phys A (1998) 66(Suppl 1): S61. doi:10.1007/s003390051100
can be detected by its adsorption on a Pt-coated sensor because a change in surface stress causes a static bending of the sensor. The diffusion of various alcohols into polymethylmethacrylate induces resonance frequency shifts in a dynamic measuring mode and bending in the static mode, which allows one to distinguish between the various alcohols.