Applied Physics A

, Volume 66, Supplement 1, pp S61–S64

A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors

  • H.P. Lang
  • R. Berger
  • F. Battiston
  • J.-P. Ramseyer
  • E. Meyer
  • C. Andreoli
  • J. Brugger
  • P. Vettiger
  • M. Despont
  • T. Mezzacasa
  • L. Scandella
  • H.-J. Güntherodt
  • C. Gerber
  • J.K. Gimzewski
Regular paper

DOI: 10.1007/s003390051100

Cite this article as:
Lang, H., Berger, R., Battiston, F. et al. Appl Phys A (1998) 66(Suppl 1): S61. doi:10.1007/s003390051100

2

can be detected by its adsorption on a Pt-coated sensor because a change in surface stress causes a static bending of the sensor. The diffusion of various alcohols into polymethylmethacrylate induces resonance frequency shifts in a dynamic measuring mode and bending in the static mode, which allows one to distinguish between the various alcohols.

PACS: 07.10.Cm; 07.79.-v; 85.42 

Copyright information

© Springer-Verlag 1998

Authors and Affiliations

  • H.P. Lang
    • 1
  • R. Berger
    • 1
  • F. Battiston
    • 2
  • J.-P. Ramseyer
    • 2
  • E. Meyer
    • 2
  • C. Andreoli
    • 1
  • J. Brugger
    • 1
  • P. Vettiger
    • 1
  • M. Despont
    • 1
  • T. Mezzacasa
    • 3
  • L. Scandella
    • 3
  • H.-J. Güntherodt
    • 2
  • C. Gerber
    • 1
  • J.K. Gimzewski
    • 1
  1. 1.IBM Research Division, Zurich Research Laboratory, Säumerstrasse 4, CH–8803 Rüschlikon, SwitzerlandCH
  2. 2.Institute of Physics, University of Basel, Klingelbergstrasse 82, CH-4056 Basel, SwitzerlandCH
  3. 3.Paul-Scherrer-Institute, Laboratory for Micro- and Nanostructures, CH-5232 Villigen-PSI, SwitzerlandCH

Personalised recommendations