Applied Physics A

, Volume 70, Issue 5, pp 547–550

Antireflection structures written by excimer laser on CVD diamond

  • S. Gloor
  • V. Romano
  • W. Lüthy
  • H.P. Weber
  • V.V. Kononenko
  • S.M. Pimenov
  • V.I. Konov
  • A.V. Khomich

DOI: 10.1007/s003390051077

Cite this article as:
Gloor, S., Romano, V., Lüthy, W. et al. Appl Phys A (2000) 70: 547. doi:10.1007/s003390051077

Abstract.

Two-dimensional antireflective periodical microstructures for the IR range are fabricated on the surface of CVD diamond films. These structures are created using an ArF excimer laser (λ=193 nm) and a direct writing scheme consisting of a beam collimator and a microscope objective to focus the beam onto the sample. Two different arrays are investigated. One has a spacing of 3 μm and is produced with single shots and the other one has a spacing of 4 μm and is produced with three shots per spot. The hole depth and shape are measured with an atomic force microscope (AFM). The optical transmittance and the scattering properties of the structure at 10.6 μm are reported for a CO2 laser beam. With a spectrometer further transmission measurements in the range of 5 to 20 μm are performed.

PACS: 42.70.K; 79.20.D; 81.65.C

Copyright information

© Springer-Verlag 2000

Authors and Affiliations

  • S. Gloor
    • 1
  • V. Romano
    • 1
  • W. Lüthy
    • 1
  • H.P. Weber
    • 1
  • V.V. Kononenko
    • 2
  • S.M. Pimenov
    • 2
  • V.I. Konov
    • 2
  • A.V. Khomich
    • 3
  1. 1.Institute of Applied Physics, Sidlerstr. 5, 3012 Berne, Switzerland (Fax: +41-31/631-3765, E-mail: valerio.romano@iap.unibe.ch)CH
  2. 2.General Physics Institute of Russian Academy of Science, Vavilov street. 38, 117942 Moscow, RussiaRU
  3. 3.Institute of Radio Engineering & Electronics, Ac. Vvendedsky sq. 1, 141120 Fryazino, Moscow region, RussiaRU