Applied Physics A

, Volume 68, Issue 1, pp 111–113

One-step microfabrication of fused silica by laser ablation of an organic solution

  • J. Wang
  • H. Niino
  • A. Yabe
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DOI: 10.1007/s003390050863

Cite this article as:
Wang, J., Niino, H. & Yabe, A. Appl Phys A (1999) 68: 111. doi:10.1007/s003390050863

2

and an acetone solution containing pyrene at a concentration of 0.4 mol/dm3. The threshold fluence was 240 mJ/cm2, which is about one-fortieth lower than that obtained with conventional KrF laser ablation.

PACS: 42.62; 81.40; 81.65

Copyright information

© Springer-Verlag 1999

Authors and Affiliations

  • J. Wang
    • 1
  • H. Niino
    • 1
  • A. Yabe
    • 1
  1. 1.National Institute of Materials and Chemical Research, Higashi 1-1, Tsukuba, 305-8565 Ibaraki, Japan (Fax: +81-298-4474, E-mail: wangjun@nimc.go.jp, yabe@nimc.go.jp)JP