Diamond-like carbon layer formation on graphite by excimer laser irradiation
- Cite this article as:
- Mechler, Á., Heszler, P., Kántor, Z. et al. Appl Phys A (1998) 66: 659. doi:10.1007/s003390050729
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fluence results in the formation of a thin hydrogen-free diamond-like carbon (DLC) film on the surface. The density of the laser-formed DLC layer is approximately 2.8 g/cm3, as calculated from area-selective Raman spectroscopy and atomic force microscopic (AFM) measurements. The proportion of the sp3 hybrid states of carbon is estimated to be approximately 50%. Annealing in air at 650 °C for 30 min recovers the graphite structure.