Applied Physics A

, Volume 66, Issue 6, pp 659–661

Diamond-like carbon layer formation on graphite by excimer laser irradiation

  • Á. Mechler
  • P. Heszler
  • Z. Kántor
  • T. Szörényi
  • Z. Bor
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DOI: 10.1007/s003390050729

Cite this article as:
Mechler, Á., Heszler, P., Kántor, Z. et al. Appl Phys A (1998) 66: 659. doi:10.1007/s003390050729
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fluence results in the formation of a thin hydrogen-free diamond-like carbon (DLC) film on the surface. The density of the laser-formed DLC layer is approximately 2.8 g/cm3, as calculated from area-selective Raman spectroscopy and atomic force microscopic (AFM) measurements. The proportion of the sp3 hybrid states of carbon is estimated to be approximately 50%. Annealing in air at 650 °C for 30 min recovers the graphite structure.

PACS: 61.80.B; 61.16.C; 78.30; 68.55

Copyright information

© Springer-Verlag 1998

Authors and Affiliations

  • Á. Mechler
    • 1
  • P. Heszler
    • 2
  • Z. Kántor
    • 1
  • T. Szörényi
    • 2
  • Z. Bor
    • 1
  1. 1.JATE University Dept. of Optics and Quantum Electronics, H-6720 Szeged, Dóm tér 9, HungaryHU
  2. 2.Research Group on Laser Physics of the Hungarian Academy of Sciences, H-6720 Szeged, Dóm tér 9, Hungary (Fax: +36-62/322-529, E-mail: heszler@physx.u-szeged.hu)HU