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Applied Physics A

, Volume 66, Issue 5, pp 579-582

First online:

Microdeposition of metal and oxide structures using ultrashort laser pulses

  • I. ZergiotiAffiliated withFoundation for Research and Technology-Hellas, Institute of Electronic Structure and Laser, FORTH-IESL, P.O. Box 1527, 71110, Hellas (Fax: +30-81/391318, E-mail: vainos@iesl.forth.gr)
  • , S. MailisAffiliated withFoundation for Research and Technology-Hellas, Institute of Electronic Structure and Laser, FORTH-IESL, P.O. Box 1527, 71110, Hellas (Fax: +30-81/391318, E-mail: vainos@iesl.forth.gr)
  • , N.A. VainosAffiliated withFoundation for Research and Technology-Hellas, Institute of Electronic Structure and Laser, FORTH-IESL, P.O. Box 1527, 71110, Hellas (Fax: +30-81/391318, E-mail: vainos@iesl.forth.gr)
  • , P. PapakonstantinouAffiliated withFoundation for Research and Technology-Hellas, Institute of Electronic Structure and Laser, FORTH-IESL, P.O. Box 1527, 71110, Hellas (Fax: +30-81/391318, E-mail: vainos@iesl.forth.gr)
  • , C. KalpouzosAffiliated withFoundation for Research and Technology-Hellas, Institute of Electronic Structure and Laser, FORTH-IESL, P.O. Box 1527, 71110, Hellas (Fax: +30-81/391318, E-mail: vainos@iesl.forth.gr)
  • , C.P. GrigoropoulosAffiliated withFoundation for Research and Technology-Hellas, Institute of Electronic Structure and Laser, FORTH-IESL, P.O. Box 1527, 71110, Hellas (Fax: +30-81/391318, E-mail: vainos@iesl.forth.gr)
  • , C. FotakisAffiliated withFoundation for Research and Technology-Hellas, Institute of Electronic Structure and Laser, FORTH-IESL, P.O. Box 1527, 71110, Hellas (Fax: +30-81/391318, E-mail: vainos@iesl.forth.gr)

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2

O3 on glass and silicon substrates is performed. The superior quality of the results allows the direct, one-step fabrication of binary-amplitude and multilevel optical diffractive structures.

PACS: 81.15.F; 07.10.C; 42.40.J