Abstract
Currently, magnetic nanostructures are routinely grown by focused electron beam induced deposition (FEBID). In the present article, we review the milestones produced in the topic in the past as well as the future applications of this technology. Regarding past milestones, we highlight the achievement of high-purity cobalt and iron deposits, the high lateral resolution obtained, the growth of 3D magnetic deposits, the exploration of magnetic alloys and the application of magnetic deposits for Hall sensing and in domain-wall conduit and magnetologic devices. With respect to future perspectives of the topic, we emphasize the potential role of magnetic nanostructures grown by FEBID for applications related to highly integrated 2D arrays, 3D nanowires devices, fabrication of advanced scanning-probe systems, basic studies of magnetic structures and their dynamics, small sensors (including biosensors) and new applications brought by magnetic alloys and even exchange biased systems.
Similar content being viewed by others
References
I. Utke, P. Hoffmann, R. Berger, L. Scandella, High-resolution magnetic Co supertips grown by a focused electron beam. Appl. Phys. Lett. 80, 4792–4794 (2002)
G. Boero, I. Utke, T. Bret, N. Quack, M. Todorova, S. Mouaziz, P. Kejik, J. Brugger, R.S. Popovic, P. Hoffmann, Submicrometer Hall devices fabricated by focused electron-beam-induced deposition. Appl. Phys. Lett. 86, 042503 (2005)
A. Fernández-Pacheco, J.M. De Teresa, R. Córdoba, M.R. Ibarra, Magnetotransport properties of high-quality cobalt nanowires grown by focused-electron-beam-induced deposition. J. Phys. D Appl. Phys. 42, 055005 (2009)
L. Serrano-Ramón, R. Córdoba, L.A. Rodríguez, C. Magen, E. Snoeck, C. Gatel, I. Serrano, M.R. Ibarra, J.M. De Teresa, Ultrasmall functional ferromagnetic nanostructures grown by focused electron-beam-induced deposition. ACS Nano 5, 7781–7787 (2011)
A. Fernandez-Pacheco, L. Serrano-Ramón, J. Michalik, M.R. Ibarra, J.M. De Teresa, L. O’Brien, D. Petit, J. Lee, R.P. Cowburn, Three dimensional magnetic nanowires grown by focused electron-beam induced deposition. Sci. Rep. 3, 1492 (2013)
J.M. De Teresa, A. Fernandez-Pacheco, L. Serrano-Ramón, R. Córdoba, M.R. Ibarra, Fabrication of magnetic nanostructures by focused electron beam induced deposition (FEBID). J. Phys. D: Appl. Phys. (manuscript in preparation)
Y.M. Lau, P.C. Chee, J.T.L. Thong, V. Ng, Properties and applications of cobalt-based material produced by electron-beam-induced deposition. J. Vac. Sci. Technol. A 20, 1295 (2002)
A. Lapicki, E. Ahmad, T. Suzuki, Ion beam induced chemical vapor deposition (IBICVD) of cobalt particles. J. Magn. Magn. Mater. 240, 47–49 (2002)
G. Leven, G. Dumpich, Resistance behavior and magnetization reversal analysis of individual Co nanowires. Phys. Rev. B 71, 064411 (2005)
W. Gil, D. Görlitz, M. Horisberger, J. Kötzler, Magnetoresistance anisotropy of polycrystalline cobalt films: geometrical-size and domain effects. Phys. Rev. B 72, 134401 (2005)
R. Córdoba, R. Fernández-Pacheco, A. Fernández-Pacheco, A. Gloter, C. Magén, O. Stéphan, M.R. Ibarra, J.M. De Teresa, Nanoscale chemical and structural study of Co-based FEBID structures by STEM-EELS and HRTEM. Nanoscale Res. Lett. 6, 592 (2011)
A. Fernández-Pacheco, J.M. De Teresa, A. Szkudlarek, R. Córdoba, M.R. Ibarra, D. Petit, L. O’Brien, H.T. Zeng, E.R. Lewis, D.E. Read, R.P. Cowburn, Magnetization reversal in individual cobalt micro- and nano-wires grown by focused-electron-beam-induced-deposition. Nanotechnology 20, 475704 (2009)
A. Himeno, T. Okuno, K. Mibu, S. Nasu, T. Shinjo, Temperature dependence of depinning fields in submicron magnetic wires with an artificial neck. J. Magn. Magn. Mater. 286, 167–170 (2005)
A. Fernández-Pacheco, J.M. De Teresa, R. Córdoba, M.R. Ibarra, D. Petit, D.E. Read, L. O’Brien, E.R. Lewis, H.T. Zeng, R.P. Cowburn, Domain wall conduit behavior in cobalt nanowires grown by focused electron beam induced deposition. Appl. Phys. Lett. 94, 192509 (2009)
D.A. Allwood, G. Xiong, C.C. Faulkner, D. Atkinson, D. Petit, R.P. Cowburn, Magnetic domain-wall logic. Science 309, 1688–1692 (2005)
S.S.P. Parkin, M. Hayashi, L. Thomas, Magnetic domain-wall racetrack memory. Science 320, 190–194 (2008)
R. Mattheis, S. Glathe, M. Diegel, U. Hübner, Concepts and steps for the realization of a new domain wall based giant magnetoresistance nanowire device: from the available 24 multiturn counter to a 212 turn counter. J. Appl. Phys. 111, 113920 (2012)
R.P. Cowburn, D. Petit, Spintronics: turbulence ahead. Nat. Mater. 4, 721–722 (2005)
M. Takeguchi, M. Shimojo, K. Furuya, Fabrication of magnetic nanostructures using electron beam induced chemical vapour deposition. Nanotechnology 16, 1321–1325 (2005)
T. Luckasczyk, M. Schirmer, H.P. Steinrück, H. Marbach, Electron-beam-induced deposition in ultra-high vacuum: lithographic fabrication of clean iron nanostructures. Small 4, 841–846 (2008)
R. Lavrijsen, R. Córdoba, F.J. Schoenaker, T. Ellis, B. Barcones, J.T. Kohlhepp, H.J.M. Swagten, B. Koopmans, J.M. de Teresa, C. Magen, M.R. Ibarra, P. Trompenaars, J.J.L. Mulders, Fe:O: C grown by focused-electron-beam-induced deposition: magnetic and electric properties. Nanotechnology 22, 025302 (2011)
M. Gavagnin, H.D. Wanzenboeck, D. Belic, E. Bertagnolli, Synthesis of individually tuned nanomagnets for nanomagnet logic by direct write focused electron beam induced deposition. ACS Nano 7, 777–784 (2013)
R. Córdoba, R. Lavrijsen, A. Fernandez-Pacheco, M.R. Ibarra, F. Schoenaker, T.H. Ellis, B. Barcones-Campo, J.T. Kohlhepp, H.J.M. Swagten, B. Koopmans, J.J.L. Mulders, J.M. de Teresa, Giant anomalous Hall effect in Fe-based microwires grown by focused-electron-beam-induced deposition. J. Phys. D Appl. Phys. 45, 035001 (2012)
R.C. Che, M. Takeguchi, M. Shimojo, W. Zhang, K. Furuya, Fabrication and electron holography characterization of FePt alloy nanorods. Appl. Phys. Lett. 87, 223109 (2005)
Q.Y. Xu, Y. Kageyama, T. Suzuki, Ion-beam-induced chemical-vapor deposition of FePt and CoPt particles. J. Appl. Phys. 97, 10K308 (2005)
L. Bernau, M. Gabureac, R. Erni, I. Utke, Tunable nanosynthesis of composite materials by electron-impact reaction. Angew. Chem. Int. Ed. 49, 8880–8884 (2010)
M.S. Gabureac, L. Bernau, I. Utke, Granular Co–C nano-Hall sensors by focused-beam-induced deposition. Nanotechnology 21, 115503 (2010)
E. Nikulina, O. Idigoras, P. Vavassori, A. Chuvilin, A. Berger, Magneto-optical magnetometry of individual 30 nm cobalt nanowires grown by electron beam induced deposition. Appl. Phys. Lett. 100, 142401 (2012)
G.C. Gazzadi, J.J.L. Mulders, P. Trompenaars, A. Ghirri, A. Rota, M. Affronte, S. Frabboni, Characterization of a new cobalt precursor for focused beam deposition of magnetic nanostructures. Microelectron. Eng. 88, 1955–1958 (2011)
M. Jafaar, L. Serrano-Ramón, O. Iglesias-Freire, A. Fernández-Pacheco, M.R. Ibarra, J.M. de Teresa, A. Asenjo, Hysteresis loops of individual Co nanostripes measured by magnetic force microscopy. Nanoscale Res. Lett. 6, 407 (2011)
R.P. Cowburn, Property variation with shape in magnetic nanoelements. J. Phys. D Appl. Phys. 33, R1–R16 (2000)
M. Gavagnin, H.D. Wanzenboeck, D. Belic, M.M. Shawrav, A. Persson, K. Gunnarsson, P. Svendlindh, E. Bertagnolli, Magnetic force microscopy study of shape engineered FEBID iron nanostructures. Phys. Status Solidi A 211, 368–374 (2013)
S. Sangiao, L. Morellon, M.R. Ibarra, J.M. De Teresa, Ferromagnet-superconductor nanocontacts grown by focused electron/ion beam techniques for current-in-plane Andreev reflection measurements. Solid State Commun. 151, 37–41 (2011)
P. Bruno, Geometrically constrained magnetic wall. Phys. Rev. Lett. 83, 2425 (1999)
B. Doudin, M. Viret, Ballistic magnetoresistance? J. Phys. Condens. Matter 20, 083201 (2008)
A. Fernández-Pacheco, L.E. Serrano-Ramón, T. Tyliszczak, K.W. Chou, R. Córdoba, A. Szkudlarek, L. O’Brien, C. Kapusta, M.R. Ibarra, J.M. De Teresa, Correlation between the magnetic imaging of cobalt nanoconstrictions and their magnetoresistance response. Nanotechnology 23, 105703 (2012)
C. Vieu, J. Gierak, H. Launois, T. Aign, P. Meyer, J.P. Jamet, J. Ferre, C. Chappert, T. Devolder, V. Mathet, H. Bernas, Modifications of magnetic properties of Pt/Co/Pt thin layers by focused gallium ion beam irradiation. J. Appl. Phys. 91, 3103 (2002)
D. Ozkaya, R.M. Langford, W.L. Chan, A.K.J. Petford-Long, Effect of Ga implantation on the magnetic properties of permalloy thin films. J. Appl. Phys. 91, 9937 (2002)
L. Serrano-Ramón, A. Fernández-Pacheco, M.R. Ibarra, T. Tyliszczak, J.M. De Teresa, Modification of domain-wall propagation in Co nanowires via Ga+ irradiation. Eur. Phys. J. B 86, 97 (2013)
D. Petit, A.-V. Jausovec, H.T. Zeng, E. Lewis, L. O’Brien, D. Read, R.P. Cowburn, High efficiency domain wall gate in ferromagnetic nanowires. Appl. Phys. Lett. 93, 163108 (2008)
L. Serrano-Ramón, A. Fernández-Pacheco, R. Córdoba, C. Magen, L.A. Rodríguez, D. Petit, R.P. Cowburn, M.R. Ibarra, J.M. De Teresa, Improvement of domain wall conduit properties in cobalt nanowires by global gallium irradiation. Nanotechnology 24, 345703 (2013)
E. Nikulina, O. Idigoras, J.M. Porro, P. Vavassori, A. Chuvilin, A. Berger, Origin and control of magnetic exchange coupling in between focused electron beam deposited cobalt nanostructures. Appl. Phys. Lett. 103, 123112 (2013)
A. Fert, L. Piraux, Magnetic nanowires. J. Magn. Magn. Mater. 200, 338 (1999)
F. Porrati, E. Begun, M. Winhold, C.H. Schwalb, R. Sachser, A.S. Frangakis, M. Huth, Room temperature L1(0) phase transformation in binary CoPt nanostructures prepared by focused-electron-beam-induced deposition. Nanotechnology 23, 185702 (2012)
F. Porrati, B. Kämpken, A. Terfort, M. Huth, Fabrication and electrical transport properties of binary Co–Si nanostructures prepared by focused electron beam-induced deposition. J. Appl. Phys. 113, 053707 (2013)
M.T. Niemier, G.H. Bernstein, G. Csaba, A. Dingler, X.S. Hu, S. Kurtz, S. Liu, J. Nahas, W. Porod, M. Siddiq, E. Varga, Nanomagnet logic: progress toward system-level integration. J. Phys. Condens. Matter 23, 493202 (2011)
A. Imre, G. Csaba, L. Ji, A. Orlov, G.H. Bernstein, W. Porod, Majority logic gate for magnetic quantum-dot cellular automata. Science 311, 205 (2006)
Nanotools website: http://www.nanotools.com/
L.M. Belova, O. Hellwig, E. Dobisz, E. Dan, Dahlberg, rapid preparation of electron beam induced deposition Co magnetic force microscopy tips with 10 nm spatial resolution. Rev. Sci. Instrum. 83, 093711 (2012)
S.M. Thompson, The discovery, development and future of GMR: the Nobel Prize 2007. J. Phys. D Appl. Phys. 41, 093001 (2008)
J. Sinova, I. Zutic, New moves of the spintronics tango. Nat. Mater. 11, 368 (2012)
L. O’Brien, D. Petit, E.R. Lewis, R.P. Cowburn, D.E. Read, J. Sampaio, H.T. Zeng, A.-V. Jausovec, Tunable remote pinning of domain walls in magnetic nanowires. Phys. Rev. Lett. 106, 087204 (2011)
J.H. Franken, M. Hoeijmakers, H.J.M. Swagten, B. Koopmans, Tunable resistivity of magnetic domain walls. Phys. Rev. Lett. 108, 037205 (2012)
W.F. van Dorp, B. van Someren, C.W. Hagen, P. Kruit, Approaching the resolution limit of nanometer-scale electron beam-induced deposition. Nano Lett. 5, 1303 (2005)
J.M. De Teresa, R. Córdoba, Arrays of densely-packed isolated nanowires by focused beam induced deposition plus Ar+ milling. ACS Nano. 8(4), 3788–3795 (2014)
J.H. Franken, M.A.J. van der Heijden, T.H. Ellis, R. Lavrijsen, C. Daniels, D. McGrouther, H.J.M. Swagten, B. Koopmans, Beam-induced Fe nanopillars as tunable domain-wall pinning sites. Adv. Funct. Mater. 24(23), 3508–3514 (2014). doi:10.1002/adfm.201303540
J. Nogués, J. Sort, V. Langlais, V. Skumryev, S. Suriñach, J.S. Muñoz, M.D. Baró, Phys. Rep. 422, 65 (2005)
J.M. De Teresa, P. Holuj, R. Córdoba, R. Fernández-Pacheco, J.M. Michalik, Fabrication of cobalt trifluoride (CoF3) phase from metallic cobalt by XeF2-assisted focused electron bean induced processing. Microelectron. Eng. 125, 78–82 (2014). doi:10.1016/j.mee.2014.01.002
E.O. Wollan, Magnetic coupling in crystalline compounds. A phenomenological theory of magnetism in 3d metals. Phys. Rev. B 117, 387 (1960)
B. Pigeau, C. Hahn, G. de Loubens, V.V. Naletov, O. Klein, K. Mitsuzuka, D. Lacour, M. Hehn, S. Andrieu, F. Montaigne, Measurement of the dynamical dipolar coupling in a pair of magnetic nanodisks using a ferromagnetic resonance force microscope. Phys. Rev. Lett. 109, 247602 (2012)
H.-J. Chia, F. Guo, L.M. Belova, R.D. McMichael, Spectroscopic defect imaging in magnetic nanostructure arrays. Appl. Phys. Lett. 101, 042408 (2012)
H. Lavenant, V.V. Naletov, O. Klein, G. de Loubens, L. Casado, J.M. De Teresa, Mechanical magnetometry of cobalt nanospheres deposited by focused electron beam at the tip of ultra-soft cantilevers. Nanofabrication 1, 65–73 (2014)
M.S. Gabureac, L. Bernau, G. Boero, I. Utke, Single superparamagnetic bead detection and direct tracing of beadposition using novel nanocomposite nano-Hall sensors. IEEE Trans. Nanotechnol. 12, 668–673 (2013)
D. Serrate, J.M. De Teresa, C. Marquina, J. Marzo, D. Saurel, F.A. Cardoso, S. Cardoso, P.P. Freitas, M.R. Ibarra, Quantitative biomolecular sensing station based on magnetoresistive patterned arrays. Biosci. Bioelectron. 35, 206–212 (2012)
S. Reyntjens, R. Puers, A review of focused ion beam applications in microsystem technology. J. Micromech. Microeng. 11, 287–300 (2001)
L.A. Rodríguez, C. Magén, E. Snoeck, L. Serrano-Ramón, C. Gatel, R. Córdoba, E. Martínez-Vecino, L. Torres, J.M. De Teresa, M.R. Ibarra, Optimized cobalt nanowires for domain wall manipulation imaged by in situ Lorentz microscopy. Appl. Phys. Lett. 102, 022418 (2013)
Acknowledgments
We warmly acknowledge all our local collaborators in this field along the last years: Rosa Córdoba, Luis Serrano-Ramón, Ricardo Ibarra, Laura Casado, Soraya Sangiao, César Magén, Luis Alfredo Rodríguez, Rodrigo Fernández-Pacheco, Inés Serrano, Jan Marek Michalik, Luis Morellón, Rubén Valero, Isabel Rivas, Gala Simón as well as our external collaborators: E. Snöeck and C. Gatel (CEMES), A. Asenjo, M. Jaafar and Oscar Iglesias-Freire (ICMM), R.Cowburn, D. Petit, L. O’ Brien, J.Lee, H. T. Zeng, E. R. Lewis and D. E. Read (U. Cambridge), G.de Loubens, H. Lavenant, V. V. Naletov and O. Klein, (CEA Saclay), Cz. Kapusta, P. Holuj and A. Szkudlarek (AGH University-Cracow), B. Koopmans, R. Lavrijsen F. J. Schoenaker, T. Ellis, B. Barcones, J. T. Kohlhepp and H. J. M. Swagten, (Eindhoven Technical University), J. J. L. Mulders and P. Trompenaars (FEI), O. Stéphan and A. Gloter (LPS Orsay), I. Utke and M. S. Gabureac (EMPA), T. Tyliszczak and K. W. Chou (ALS, Berkeley), L. Torres and E. Martínez-Vecino (U. Salamanca). This work was supported by Spanish Ministry of Economy and Competitivity through project No. MAT2011- 27553-C02, including FEDER funds, by the Aragón Regional Government, by the I-LINK0026 project funded by the Spanish CSIC and by a Marie Curie Intra European Fellowship project No. 251698: 3DMAGNANOW, funded by the 7th European Community Framework Programme.
Author information
Authors and Affiliations
Corresponding authors
Rights and permissions
About this article
Cite this article
De Teresa, J.M., Fernández-Pacheco, A. Present and future applications of magnetic nanostructures grown by FEBID. Appl. Phys. A 117, 1645–1658 (2014). https://doi.org/10.1007/s00339-014-8617-7
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00339-014-8617-7