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Role of thermal stresses on pulsed laser irradiation of thin films under conditions of microbump formation and nonvaporization forward transfer

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Abstract

This paper presents a theoretical analysis of the processes in thin solid films irradiated by short and ultrashort laser pulses in the regimes of film structuring and laser-induced forward transfer. The regimes are considered at which vaporization of the film materials is insignificant and film dynamics is governed mainly by mechanical processes. Thermoelastoplastic modeling has been performed for a model film in one- and two-dimensional geometries. A method has been proposed to estimate the height of microbumps produced by nanosecond laser irradiation of solid films. Contrary to femtosecond laser pulses, in nanosecond pulse regimes, stress waves across the film are weak and cannot induce film damage. The main role in laser-induced dynamics of irradiated films is played by radial thermal stresses which lead to the formation of a bending wave propagating along the film and drawing the film matter to the center of the irradiation spot. The bending wave dynamics depends on the hardness of the substrate underlying the film. The causes of the receiver substrate damage sometimes observed upon laser-induced forward transfer in the scheme of the direct contact between the film and the receiver are discussed.

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Acknowledgements

T.L. and T.M. would like to acknowledge financial support from PSI and the FP7 European project ‘e-LIFT’ (project No. 247868—call FP7-ICT-2009-4). M.V.S. and N.M.B. acknowledge support from the Russian Foundation for Basic Research (RFBR project No. 11-08-00427).

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Authors and Affiliations

  1. Design and Technology Branch of Lavrentyev Institute of Hydrodynamics SB, RAS, Tereshkovoi Street 29, 630090, Novosibirsk, Russia

    Yuri P. Meshcheryakov

  2. Institute of Thermophysics SB, RAS, 1, Lavrentyev Ave., 630090, Novosibirsk, Russia

    Maxim V. Shugaev & Nadezhda M. Bulgakova

  3. General Energy Research Department, Paul Scherrer Institut, 5232, Villigen PSI, Switzerland

    Thomas Mattle & Thomas Lippert

  4. Optoelectronics Research Center, University of Southampton, Southampton, SO17 1BJ, UK

    Nadezhda M. Bulgakova

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  1. Yuri P. Meshcheryakov
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  2. Maxim V. Shugaev
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  5. Nadezhda M. Bulgakova
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Correspondence to Nadezhda M. Bulgakova.

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Meshcheryakov, Y.P., Shugaev, M.V., Mattle, T. et al. Role of thermal stresses on pulsed laser irradiation of thin films under conditions of microbump formation and nonvaporization forward transfer. Appl. Phys. A 113, 521–529 (2013). https://doi.org/10.1007/s00339-013-7563-0

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