Applied Physics A

, Volume 110, Issue 1, pp 129–135

Unusual photoelectric behaviors of Mo-doped TiO2 multilayer thin films prepared by RF magnetron co-sputtering: effect of barrier tunneling on internal charge transfer


  • B. X. Yan
    • Department of Materials ScienceFudan University
  • S. Y. Luo
    • Department of Materials ScienceFudan University
    • College of ScienceGuizhou University for Nationalities
  • X. G. Mao
    • Department of Materials ScienceFudan University
    • Department of Materials ScienceFudan University
  • Q. F. Zhou
    • Department of Materials ScienceFudan University

DOI: 10.1007/s00339-012-7433-1

Cite this article as:
Yan, B.X., Luo, S.Y., Mao, X.G. et al. Appl. Phys. A (2013) 110: 129. doi:10.1007/s00339-012-7433-1


Mo-doped TiO2 multilayer thin films were prepared by RF magnetron co-sputtering. Microstructures, crystallite parameters and the absorption band were investigated with atomic force microscopy, X-ray diffraction and ultraviolet-visible spectroscopy. Internal carrier transport characteristics and the photoelectric property of different layer-assemble modes were examined on an electrochemical workstation under visible light. The result indicates that the double-layer structure with an undoped surface layer demonstrated a red-shifted absorption edge and a much stronger photocurrent compared to the uniformly doped sample, signifying that the electric field implanted at the interface between particles in different layers accelerated internal charge transfer effectively. However, a heavily doped layer implanted at the bottom of the three-layer film merely brought about negative effects on the photoelectric property, mainly because of the Schottky junction existing above the substrate. Nevertheless, this obstacle was successfully eliminated by raising the Mo concentration to 1020 cm−3, where the thickness of the depletion layer fell into the order of angstroms and the tunneling coefficient manifested a dramatic increase. Under this circumstance, the Schottky junction disappeared and the strongest photocurrent was observed in the three-layer film.

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© Springer-Verlag Berlin Heidelberg 2012