Applied Physics A

, Volume 106, Issue 1, pp 5–13

Single- and multi-scan femtosecond laser writing for selective chemical etching of cross section patternable glass micro-channels

  • Stephen Ho
  • Peter R. Herman
  • J. Stewart Aitchison
Invited paper

DOI: 10.1007/s00339-011-6675-7

Cite this article as:
Ho, S., Herman, P.R. & Aitchison, J.S. Appl. Phys. A (2012) 106: 5. doi:10.1007/s00339-011-6675-7

Abstract

We report on the fabrication of three dimensional micro-fluidic channels in fused silica glass using a combination of femtosecond laser writing and hydrofluoric acid wet etching to flexibly create various cross-sectional profiles of highly uniform shape and smooth vertical walls. The laser power, polarization, focusing depth, scanning angle and scanning speed were systematically studied with single- and multi-scan configurations to assess optimum micro-channel formation including etch rate, surface roughness, and stress-induced crack formation. We introduce the formation of vertical access-ports that extend the buried channel formation to unlimited length without tapering or distortion of the channel cross-sectional shape.

Copyright information

© Springer-Verlag 2011

Authors and Affiliations

  • Stephen Ho
    • 1
  • Peter R. Herman
    • 1
  • J. Stewart Aitchison
    • 1
  1. 1.The Edward S. Rogers Sr. Department of Electrical and Computer Engineering and the Institute for Optical SciencesUniversity of TorontoTorontoCanada