A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining
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- Qiao, L., He, F., Wang, C. et al. Appl. Phys. A (2011) 102: 179. doi:10.1007/s00339-010-6096-z
We report on the integration of microlens and microfluidic channels in fused silica glass chip using femtosecond laser micromachining. The main process includes three procedures: (1) femtosecond laser scanning for forming a hemispherical surface and a Y-shaped channel in the fused silica glass; (2) chemical etching of the sample for removal of the modified areas; and (3) oxyhydrogen (OH) flame polish for smoothening the surface of the microlens. In addition, we demonstrate that the fabricated microlens exhibits good imaging performance with a 5× magnification, showing great potential in future lab-on-a-chip applications.