Applied Physics A

, Volume 102, Issue 1, pp 179–183

A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining

  • Lingling Qiao
  • Fei He
  • Chen Wang
  • Ya Cheng
  • Koji Sugioka
  • Katsumi Midorikawa
Article

DOI: 10.1007/s00339-010-6096-z

Cite this article as:
Qiao, L., He, F., Wang, C. et al. Appl. Phys. A (2011) 102: 179. doi:10.1007/s00339-010-6096-z

Abstract

We report on the integration of microlens and microfluidic channels in fused silica glass chip using femtosecond laser micromachining. The main process includes three procedures: (1) femtosecond laser scanning for forming a hemispherical surface and a Y-shaped channel in the fused silica glass; (2) chemical etching of the sample for removal of the modified areas; and (3) oxyhydrogen (OH) flame polish for smoothening the surface of the microlens. In addition, we demonstrate that the fabricated microlens exhibits good imaging performance with a 5× magnification, showing great potential in future lab-on-a-chip applications.

Copyright information

© Springer-Verlag 2010

Authors and Affiliations

  • Lingling Qiao
    • 1
    • 2
  • Fei He
    • 1
    • 2
  • Chen Wang
    • 1
  • Ya Cheng
    • 1
  • Koji Sugioka
    • 3
  • Katsumi Midorikawa
    • 3
  1. 1.State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine MechanicsChinese Academy of SciencesShanghaiChina
  2. 2.Graduate School of the Chinese Academy of SciencesBeijingChina
  3. 3.Laser Technology Laboratory, RIKEN—Advanced Science InstituteSaitamaJapan