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Applied Physics A

, Volume 102, Issue 1, pp 39-44

First online:

Fabrication of quasi-periodic micro-voids in fused silica by single femtosecond laser pulse

  • Xianhua WangAffiliated withKey Laboratory for Physical Electronics and Devices of the Ministry of Education & Key Laboratory of Photonics Technology for Information, Shaanxi Province, School of Electronics and Information Engineering, Xi’an Jiaotong University
  • , Feng ChenAffiliated withKey Laboratory for Physical Electronics and Devices of the Ministry of Education & Key Laboratory of Photonics Technology for Information, Shaanxi Province, School of Electronics and Information Engineering, Xi’an Jiaotong University Email author 
  • , Qing YangAffiliated withState Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University
  • , Hewei LiuAffiliated withKey Laboratory for Physical Electronics and Devices of the Ministry of Education & Key Laboratory of Photonics Technology for Information, Shaanxi Province, School of Electronics and Information Engineering, Xi’an Jiaotong University
  • , Hao BianAffiliated withKey Laboratory for Physical Electronics and Devices of the Ministry of Education & Key Laboratory of Photonics Technology for Information, Shaanxi Province, School of Electronics and Information Engineering, Xi’an Jiaotong University
  • , Jinhai SiAffiliated withKey Laboratory for Physical Electronics and Devices of the Ministry of Education & Key Laboratory of Photonics Technology for Information, Shaanxi Province, School of Electronics and Information Engineering, Xi’an Jiaotong University
  • , Xun HouAffiliated withKey Laboratory for Physical Electronics and Devices of the Ministry of Education & Key Laboratory of Photonics Technology for Information, Shaanxi Province, School of Electronics and Information Engineering, Xi’an Jiaotong University

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Abstract

We demonstrate that quasi-periodic void structure can be self-formed in transparent materials by single femtosecond laser pulse. Compared to the multiple-pulse induced structures, the single-pulse induced void structures are very short and may contain absent voids. The formation mechanisms have been discussed comparatively in detail. Based on this, a technique for high-speed and large-area fabrication of micro-void arrays in transparent materials has been presented. The experimental results show that 3D micro-void structures which contain over several hundred thousand voids in micrometer scales are produced in areas of square millimeters within a few minutes, and the periods of micro-void structures can be easily varied by processing parameters. This work has potential applications in 3D optical storage, photonic crystal and integrated optics, and provides novel insight into the interaction between the single femtosecond pulse and the transparent materials.